Integrated Circuit Device, Oscillator, Electronic Device, And Vehicle

ABSTRACT

An integrated circuit device includes a digital signal processing circuit that generates frequency control data by performing a temperature compensation process by a neural network calculation process based on temperature detection data and an amount of change in time of the temperature detection data, and an oscillation signal generation circuit that generates an oscillation signal of a frequency set by the frequency control data using a resonator.

BACKGROUND 1. Technical Field

The present invention relates to an integrated circuit device, anoscillator, an electronic device, a vehicle, and the like.

2. Related Art

In the related art, oscillators such as a temperature compensatedcrystal oscillator (TCXO), an oven controlled crystal oscillator (OCXO),and a simple packaged crystal oscillator (SPXO) are known. For example,TCXO is an oscillator that is set to acquire a stable oscillationfrequency with respect to a change in ambient temperature bycompensating the temperature characteristics of the oscillationfrequency of a quartz crystal resonator. TCXO is used as a referencesignal source or the like in, for example, a portable communicationterminal, a GPS-related device, a wearable device, or a vehicle-mounteddevice.

In the case of using the oscillator as a reference signal source, a highaccuracy oscillation frequency needs to be implemented. Thus, atemperature compensation process has to be executed with high accuracy.For example, a method of using a neural network in the temperaturecompensation process for the quartz crystal resonator is disclosed inJohn C. Esterline, “Temperature Compensation of Crystal OscillatorsUsing an Artificial Neural Network”, 21-24 May 2012, Frequency ControlSymposium (FCS), 2012 IEEE International.

In the case of a resonator device (oscillator) that includes a resonatorand an integrated circuit device, it is considered that the integratedcircuit device acts as one heat source, and heat generated by the heatsource propagates to the resonator. In this case, a delay in heatconduction may cause a difference between the temperature of theresonator and the temperature of the integrated circuit device. However,in the invention disclosed in John C. Esterline, “TemperatureCompensation of Crystal Oscillators Using an Artificial Neural Network”,21-24 May 2012, Frequency Control Symposium (FCS), 2012 IEEEInternational, neural network calculation is performed using detectedtemperature detection data as needed. Thus, heat conduction between theintegrated circuit device (temperature sensor) and the resonator cannotbe considered, and a problem arises in that the accuracy of thetemperature compensation process cannot be increased.

SUMMARY

An advantage of some aspects of the invention is to solve at least apart of the problems described above, and the invention can beimplemented as the following forms or aspects.

An aspect of the invention relates to an integrated circuit deviceincluding a digital signal processing circuit that generates frequencycontrol data by performing a temperature compensation process using aneural network calculation process based on temperature detection dataand an amount of change in time of the temperature detection data, andan oscillation signal generation circuit that generates an oscillationsignal of a frequency set by the frequency control data using aresonator.

In the aspect of the invention, the temperature compensation process isperformed by neural network calculation using the amount of change intime of the temperature detection data from the temperature sensor. Bydoing so, the neural network calculation (temperature compensationprocess) in which heat conduction between the integrated circuit deviceand the resonator is considered can be performed. While a differencebetween a temperature detected by the temperature sensor and thetemperature of the resonator is a cause of decrease in the accuracy ofthe temperature compensation process, using the amount of change in timeenables a process in which the difference is considered, and thetemperature compensation process can be performed with higher accuracythan that in a case where the temperature detection data is used asneeded.

In the aspect of the invention, the integrated circuit device mayfurther include a drive circuit that drives the resonator, a firstoscillation terminal coupled to one of an input node or an output nodeof the drive circuit, a second oscillation terminal coupled to the otherof the input node or the output node of the drive circuit, a powersupply terminal where a power supply voltage is supplied, an outputterminal from which the oscillation signal is output, and a firsttemperature sensor that generates the temperature detection data. Adistance between the first temperature sensor and the first oscillationterminal may be smaller than at least one of a distance between thefirst temperature sensor and the power supply terminal or a distancebetween the first temperature sensor and the output terminal.

The drive circuit needs to be electrically coupled to the resonator, andthe first oscillation terminal and the second oscillation terminalconstitute a main heat conduction path between the integrated circuitdevice and the resonator. As described above, by disposing thetemperature sensor at a position closer to the first oscillationterminal than the power supply terminal or the output terminal, a changein temperature based on heat conduction to the resonator is easilydetected. Thus, the accuracy of the temperature compensation process inwhich heat conduction between the integrated circuit device and theresonator is considered can be improved.

In the aspect of the invention, the integrated circuit device mayfurther include a second temperature sensor. A distance between thesecond temperature sensor and the second oscillation terminal may besmaller than at least one of a distance between the second temperaturesensor and the power supply terminal or a distance between the secondtemperature sensor and the output terminal.

By disposing the temperature sensor at a position closer to the secondoscillation terminal than the power supply terminal or the outputterminal, a change in temperature based on heat conduction to theresonator is further easily detected. Thus, the accuracy of thetemperature compensation process in which heat conduction between theintegrated circuit device and the resonator is considered can beimproved.

In the aspect of the invention, the integrated circuit device mayfurther include a third temperature sensor and a support terminal inwhich an electrode for supporting the resonator is disposed. A distancebetween the third temperature sensor and the support terminal may besmaller than at least one of a distance between the third temperaturesensor and the power supply terminal or a distance between the thirdtemperature sensor and the output terminal.

The support terminal is a terminal that is used for connection betweenthe integrated circuit device and the resonator. Thus, the supportterminal constitutes a main heat conduction path between the integratedcircuit device and the resonator. As described above, by disposing thetemperature sensor at a position closer to the support terminal than thepower supply terminal or the output terminal, a change in temperaturebased on heat conduction to the resonator is further easily detected.Thus, the accuracy of the temperature compensation process in which heatconduction between the integrated circuit device and the resonator isconsidered can be improved.

In the aspect of the invention, the integrated circuit device mayfurther include a third temperature sensor and a support terminal inwhich an electrode for supporting a relay substrate on which theresonator is mounted is disposed. A distance between the thirdtemperature sensor and the support terminal may be smaller than at leastone of a distance between the third temperature sensor and the powersupply terminal or a distance between the third temperature sensor andthe output terminal.

Even with the relay substrate, the support terminal is a terminal thatis used for connection between the integrated circuit device and theresonator. Thus, the support terminal constitutes a main heat conductionpath between the integrated circuit device and the resonator. Bydisposing the temperature sensor at a position closer to the supportterminal than the power supply terminal or the output terminal, a changein temperature based on heat conduction to the resonator is furthereasily detected. Thus, the accuracy of the temperature compensationprocess in which heat conduction between the integrated circuit deviceand the resonator is considered can be improved.

In the aspect of the invention, the digital signal processing circuitmay perform the temperature compensation process based on a result oftemperature compensation calculation using polynomial approximation anda result of the neural network calculation process.

By combining the polynomial approximation in the neural networkcalculation, the number of neurons in a neural network can be reduced.Thus, the load of the neural network calculation can be reduced, and theamount of data of a parameter stored in a storage unit can be reduced.

In the aspect of the invention, the digital signal processing circuitmay obtain a temperature estimation value of the resonator by the neuralnetwork calculation process and perform the temperature compensationcalculation based on the polynomial approximation using the obtainedtemperature estimation value.

By obtaining the temperature estimation value of the resonator, thetemperature compensation process can be executed with high accuracy.

In the aspect of the invention, the digital signal processing circuitmay obtain the temperature estimation value by a first neural networkcalculation process based on the temperature detection data and theamount of change in time, obtain first frequency control data by asecond neural network calculation process based on the temperatureestimation value, obtain second frequency control data by thetemperature compensation calculation based on the polynomialapproximation, and obtain the frequency control data based on the firstfrequency control data and the second frequency control data.

With this configuration, the frequency control data can be calculated bycombining two stages of neural network calculation and the polynomialapproximation using the temperature estimation value.

In the aspect of the invention, the digital signal processing circuitmay obtain the temperature estimation value and first frequency controldata by third neural network calculation based on the temperaturedetection data and the amount of change in time, obtain second frequencycontrol data by the temperature compensation calculation based on thepolynomial approximation, and obtain the frequency control data based onthe first frequency control data and the second frequency control data.

With this configuration, the frequency control data can be obtained bycombining one neural network calculation and the polynomialapproximation using the temperature estimation value.

Another aspect of the invention relates to an integrated circuit deviceincluding first to N-th (N is an integer greater than or equal to two)temperature sensors, an A/D conversion circuit that performs A/Dconversion on first to N-th temperature detection voltages from thefirst to N-th temperature sensors and outputs first to N-th temperaturedetection data, a digital signal processing circuit that generatesfrequency control data by performing a temperature compensation processby a neural network calculation process based on an amount of change intime of i-th (i is an integer satisfying 1≤i≤N) temperature detectiondata of the first to N-th temperature detection data, and an oscillationsignal generation circuit that generates an oscillation signal of anoscillation frequency corresponding to the frequency control data usinga resonator.

In the aspect of the invention, a plurality of temperature sensors aredisposed in the integrated circuit device. A plurality of pieces oftemperature detection data from the plurality of temperature sensors areacquired. The temperature compensation process is performed by theneural network calculation using the amount of change in time of atleast one of the plurality of pieces of temperature detection data. Bydoing so, the neural network calculation (temperature compensationprocess) in which heat conduction between the integrated circuit deviceand the resonator is considered can be performed. While a differencebetween a temperature detected by the temperature sensor and thetemperature of the resonator is a cause of decrease in the accuracy ofthe temperature compensation process, using the plurality of temperaturesensor and using the amount of change in time enable a process in whichthe difference is considered, and the temperature compensation processcan be performed with higher accuracy than that in a case where a singletemperature sensor is used or a case where the temperature detectiondata is used as needed.

Still another aspect of the invention relates to an oscillator includinga resonator and an integrated circuit device. The integrated circuitincludes a digital signal processing circuit that generates frequencycontrol data by performing a temperature compensation process using aneural network calculation process based on temperature detection dataand an amount of change in time of the temperature detection data and anoscillation signal generation circuit that generates an oscillationsignal of a frequency set by the frequency control data using theresonator.

Still another aspect of the invention relates to an electronic deviceincluding the integrated circuit device.

Still another aspect of the invention relates to a vehicle including theintegrated circuit device.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be described with reference to the accompanyingdrawings, wherein like numbers reference like elements.

FIG. 1 is an example of the temperature characteristics of a resonator.

FIG. 2 is an example of the temperature characteristics of a variablecapacitance circuit (varactor).

FIG. 3 is an example of the result of a temperature compensation processbased on polynomial approximation and the result of the temperaturecompensation process in combination with a neural network calculation.

FIG. 4 is an example of a temperature sweep in an inspection step.

FIG. 5 is an example of a relationship between a temperature and afrequency deviation during the temperature sweep.

FIG. 6 is an example of a difference in temperature between a detectiontemperature of a temperature sensor and the temperature of theresonator.

FIG. 7 is a plan view illustrating a configuration of a resonator deviceincluding an integrated circuit device and the resonator.

FIG. 8 is a sectional view illustrating a configuration of the resonatordevice including the integrated circuit device and the resonator.

FIG. 9 is another plan view illustrating a configuration of theresonator device including the integrated circuit device and theresonator.

FIG. 10 is another sectional view illustrating a configuration of theresonator device including the integrated circuit device and theresonator.

FIG. 11 is a configuration example of the integrated circuit device.

FIG. 12 is a diagram for describing the arrangement of temperaturesensors.

FIG. 13 is a descriptive diagram of a neural network.

FIG. 14 is a descriptive diagram of backpropagation.

FIG. 15 is an example of change in time of temperature detection datameasured in the inspection step.

FIG. 16 is an example of change in time of the frequency of anoscillation signal actually measured in the inspection step.

FIG. 17 is a diagram for describing the temperature compensation processof the present embodiment.

FIG. 18 is a flowchart for describing the temperature compensationprocess.

FIG. 19 is a diagram for describing a heat conduction path of theresonator device (oscillator).

FIG. 20 is an example of a heat conduction model of the resonator device(oscillator).

FIG. 21 is an example of change in time of a temperature estimationvalue estimated from actual measurement data and the heat conductionmodel.

FIG. 22 is another diagram for describing the temperature compensationprocess of the embodiment.

FIG. 23 is another flowchart for describing the temperature compensationprocess.

FIG. 24 is another diagram for describing the temperature compensationprocess of the embodiment.

FIG. 25 is a flowchart for describing the temperature compensationprocess.

FIG. 26 is another configuration example of the integrated circuitdevice.

FIG. 27 is another configuration example of the integrated circuitdevice.

FIG. 28 is a configuration example of a PLL circuit.

FIG. 29 is a configuration example of an electronic device.

FIG. 30 is a configuration example of a vehicle.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

Hereinafter, an exemplary embodiment of the invention will be describedin detail. The embodiment described below does not unduly limit thecontent of the invention disclosed in the appended claims, and not allconfigurations described in the embodiment are necessarily a solution ofthe invention.

1. METHOD OF EMBODIMENT

First, a method of the embodiment will be described. An oscillator suchas TCXO is used as a reference signal source or the like in variousdevices. For example, while frequency division duplex (FDD) is used thusfar as a communication scheme between a base station and a communicationterminal, time division duplex (TDD) is used in a next generationcommunication scheme such as 5G. In the TDD scheme, data is transmittedand received in a time division manner using the same frequency in anuplink and a downlink, and a guard time is set between time slotsallocated to each device. Thus, in order to implement appropriatecommunication, each device needs to synchronize time, and accuratetracking of absolute time is required. In addition, in the case of usingthe oscillator as a reference signal source, a problem of so-calledholdover arises. For example, frequency fluctuation can be reduced bysynchronizing the oscillation signal (output signal) of the oscillatorwith a reference signal from GPS or a network using a PLL circuit.However, in a case where the holdover in which the reference signal fromGPS or the network (Internet) is lost or affected occurs, the referencesignal for synchronization cannot be acquired. Accordingly, in a casewhere such holdover occurs, the absolute time needs to be tracked on theoscillator side in the absence of the reference signal, andcommunication fails in a case where the tracked time deviates. Thus, theoscillator requires very high frequency stability even in the holdoverperiod.

The temperature characteristics of a resonator are considered to be acause of decrease in the accuracy of the oscillation frequency. FIG. 1is an example of the temperature characteristics of a quartz crystalresonator. A horizontal axis denotes a temperature, and a vertical axisdenotes a frequency deviation (an error with respect to a setfrequency). As illustrated in FIG. 1, the quartz crystal resonator hastemperature characteristics similar to a cubic function. Thus, anintegrated circuit device (in a narrow sense, DPS) of the oscillatorexecutes a temperature compensation process that reduces fluctuation ofthe oscillation frequency accompanied by temperature fluctuation. Forexample, as will be described using FIG. 11, a digital signal processingcircuit 23 (DSP) outputs frequency control data DDS based on temperaturedetection data TD, and an oscillation signal generation circuit 40controls the oscillation frequency of a resonator 10 based on thefrequency control data DDS.

For example, it is considered that the oscillation frequency of theresonator 10 is controlled by including a varactor as a variablecapacitance circuit in the oscillation signal generation circuit 40 andchanging a capacitance value by controlling a voltage applied to thevaractor.

FIG. 2 is an example of the temperature characteristics of the varactor.A horizontal axis denotes the applied voltage, and a vertical axisdenotes the amount of change in frequency (unit: ppm/V). In FIG. 2,seven temperatures between −40° C. and 140° C. are illustrated. As isunderstood from FIG. 2, the amount of change in frequency caused by thevaractor changes depending on the temperature.

In such a case, the temperature characteristics of the oscillationfrequency are determined by superposition of the temperaturecharacteristics of the resonator 10 illustrated in FIG. 1 and thetemperature characteristics of the varactor illustrated in FIG. 2. Thus,the relationship between the temperature and the frequency or thefrequency deviation is not represented by a smooth polynomial, and alocal change in value such as a dip occurs.

FIG. 3 is a diagram representing the result of the temperaturecompensation process, and Al in FIG. 3 represents the result of thetemperature compensation process based on 12-degree polynomialapproximation. In FIG. 3, a horizontal axis denotes the temperature, anda vertical axis denotes the frequency deviation. As is understood fromAl in FIG. 3, a certain degree of error is left in the temperaturecompensation process based on polynomial approximation. It is consideredthat problems do not arise with the accuracy illustrated by A1 dependingon the application of the oscillator. However, in a case where a veryhigh accuracy oscillation frequency needs to be implemented as in theabove example of TDD, sufficient accuracy is not acquired withpolynomial approximation.

Meanwhile, a method of using a neural network in the temperaturecompensation process as in John C. Esterline, “Temperature Compensationof Crystal Oscillators Using an Artificial Neural Network”, 21-24 May2012, Frequency Control Symposium (FCS), 2012 IEEE International isconsidered. The neural network is known to enable approximation of afunction of any shape with high accuracy. Thus, even in a case wherecharacteristics are complicated by superposition of the temperaturecharacteristics of the resonator 10 and the varactor, it is consideredthat a high accuracy temperature compensation process is enabled.

However, a single temperature sensor is used in John C. Esterline,“Temperature Compensation of Crystal Oscillators Using an ArtificialNeural Network”, 21-24 May 2012, Frequency Control Symposium (FCS), 2012IEEE International. While accuracy can be improved by increasing thenumber of inputs in the neural network, the number of inputs is small inJohn C. Esterline, “Temperature Compensation of Crystal OscillatorsUsing an Artificial Neural Network”, 21-24 May 2012, Frequency ControlSymposium (FCS), 2012 IEEE International, thereby posing a problem inthat it is difficult to perform the temperature compensation processwith high accuracy.

In addition, as illustrated in FIG. 1, the temperature of the resonator10 is important in the temperature compensation process. However, it isnot easy to dispose a temperature sensor in the resonator 10. Atemperature sensor 26 is disposed in a location, particularly, anintegrated circuit device 20, other than the resonator 10.

FIG. 4 is an example of a temperature sweep in an inspection step. InFIG. 4, a horizontal axis denotes time, and a vertical axis denotes thetemperature of a constant temperature chamber used in the inspectionstep. In the example in FIG. 4, a control that increases the temperatureto +125° C. from +25° C. as a starting point, then performs cooling to−40° C., and then, returns the temperature to +25° C. is performed for33 hours. Usually, in the inspection step, the temperature sweep isperformed as in FIG. 4, and the temperature detection data TD and thefrequency control data DDS at that point are obtained. A learningprocess of the neural network and a process of determining thecoefficient of a polynomial approximation function are executed usingthe obtained values as learning data (training data).

FIG. 5 is a diagram representing a simulation result of the temperaturecompensation process in a case where the temperature sweep illustratedin FIG. 4 is performed. In FIG. 5, a horizontal axis denotes time, and avertical axis denotes the frequency deviation (unit: ppb). In FIG. 5,heat conduction between the integrated circuit device and the resonatoris regarded as a low pass filter (hereinafter, referred to as LPF), anda simple correction system that performs the temperature compensationprocess based on polynomial approximation using a signal acquired aftera low pass filter process on a temperature signal is assumed. As thecutoff frequency of LPF is decreased, a delay in heat conduction betweenthe temperature sensor and the resonator is extended. As the cutofffrequency of LPF is increased, a delay in heat conduction between thetemperature sensor and the resonator is shortened. FIG. 5 illustrates asimulation result in a case where the cutoff frequency is set to 1 Hz(the heat conduction delay is one second).

As is understood from FIG. 5, in a case where the cutoff frequency is 1Hz, the width of the frequency deviation is increased to a certaindegree. Specifically, even at the same temperature, the frequencydeviation after the temperature compensation process varies at anincrease in temperature and at a decrease in temperature (hysteresisoccurs). This simulation result indicates that even in a case where theheat conduction delay between the temperature sensor 26 and theresonator 10 is approximately one second, the delay causes thetemperature compensation process not to be executed with sufficientaccuracy. In a case where the cutoff frequency is high (that is, in acase where the heat conduction delay is short), the frequency deviationcan be restricted to fall within a narrow range. However, as isunderstood from FIG. 5, the allowed heat conduction delay for acquiringsufficient accuracy is shorter than one second.

FIG. 6 is a diagram for describing heat conduction between thetemperature sensor 26 and the resonator 10. In FIG. 6, a horizontal axisdenotes the logarithm of elapsed time, and a vertical axis denotes adifference in temperature between the temperature sensor 26 and theresonator 10. FIG. 6 is the result of simulation of a state where heatis generated from a given circuit of the integrated circuit device 20 asa heat source, and the heat propagates. As illustrated in FIG. 6, first,the temperature of the temperature sensor 26 that is relatively close tothe heat source is increased, and the difference in temperature with theresonator 10 is increased. Since heat is also transmitted to theresonator 10 along with an elapse of time, the temperature of theresonator 10 is also increased, and the difference in temperaturebetween the temperature sensor 26 and the resonator 10 is soon decreasedto zero.

As is understood from FIG. 6, a delay of approximately 100 seconds ispresent in heat conduction between the temperature sensor 26 and theresonator 10. That is, setting the heat conduction delay to be shorterthan one second is not realistic. From FIG. 5 and FIG. 6, it isunderstood that the heat conduction delay between the temperature sensor26 and the resonator 10 cannot be ignored as a cause of decreasing theaccuracy of the temperature compensation process. That is, in order toperform the temperature compensation process with high accuracy, aprocess that considers heat conduction between the integrated circuitdevice 20 and the resonator 10 needs to be performed.

From such a point, in the case of using a single temperature sensor asin John C. Esterline, “Temperature Compensation of Crystal OscillatorsUsing an Artificial Neural Network”, 21-24 May 2012, Frequency ControlSymposium (FCS), 2012 IEEE International, heat conduction cannot bereflected on the process. As described above, in the case of focusing ona given temperature, the oscillation frequency changes depending onwhether the given temperature is a temperature at the time of increaseor a temperature at the time of decrease, or depending on the degree ofa temperature gradient. Thus, using a single temperature sensor cannotdistinguish between those situations.

In addition, many circuits are disposed in the integrated circuit device20. Thus, the circuit as a heat source may be changed. In that case,heat conduction from the heat source to the temperature sensor 26 andheat conduction from the heat source to the resonator 10 are changed.For example, as will be described using FIG. 19 and the like, thetemperature sensor 26 is disposed in the vicinity of one heattransmission path in a case where a plurality of heat transmission pathsare present between the integrated circuit device 20 and the resonator10. In this case, in a case where the heat source is close to the heattransmission path, the detection temperature of the temperature sensor26 is instantly increased. Thus, the difference in temperature betweenthe temperature sensor 26 and the resonator 10 is likely to beincreased. Meanwhile, in a case where the heat source is close to a heattransmission path on another side, transfer of a certain amount of heatto the resonator 10 is started through the heat transmission path on theother side when the detection temperature of the temperature sensor 26is increased. Thus, the difference in temperature between thetemperature sensor 26 and the resonator 10 is considered to bedecreased. That is, the temperature of the resonator 10 may vary even ina case where the detection temperature of the temperature sensor 26 isthe same.

As described above, the neural network is considered to be useful forthe temperature compensation process. However, in a case where the inputis not appropriately set, sufficient accuracy is not acquired.Meanwhile, broadly two measures are considered in the embodiment.

A first measure is such that a plurality of temperature sensors 26 aredisposed in the integrated circuit device 20 in the embodiment. Theintegrated circuit device 20 of the embodiment includes the first toN-th (N is an integer greater than or equal to two) temperature sensors26, an A/D conversion circuit 27, the digital signal processing circuit23 (a processor or DSP), and the oscillation signal generation circuit40. The A/D conversion circuit 27 performs A/D conversion on first toN-th temperature detection voltages from the first to N-th temperaturesensors 26 and outputs first to N-th temperature detection data TD1 toTDN. The digital signal processing circuit 23 generates the frequencycontrol data DDS by performing the temperature compensation processusing a neural network calculation process based on the first to N-thtemperature detection data TD1 to TDN. The oscillation signal generationcircuit 40 generates an oscillation signal of a frequency set by thefrequency control data DDS using the resonator 10.

The integrated circuit device 20 represents a device in which thecircuits such as the A/D conversion circuit 27, the digital signalprocessing circuit 23, and the oscillation signal generation circuit 40and the temperature sensors 26 are integrated in one chip.

By disposing the plurality of temperature sensors in the integratedcircuit device 20, the temperature compensation process in which heatconduction is considered can be performed, and a high accuracyoscillation frequency can be implemented. Specifically, a combination ofN pieces of temperature detection data TD1 to TDN changes depending onthe position of the heat source, the amount of generated heat, or achange in temperature. Thus, heat conduction is considered in the neuralnetwork calculation process that takes data based on the first to N-thtemperature detection data TD1 to TDN as input. In a case where it isconsidered that heat conduction is reflected on the first to N-thtemperature detection data TD1 to TDN, the temperature sensors 26 aredesirably arranged at positions away from each other to a certaindegree. In addition, in a case where it is considered that thetemperature of the resonator 10 is important, each temperature sensor 26is desirably arranged in the vicinity of the heat transmission pathbetween the integrated circuit device 20 and the resonator 10. Anexample of arrangement of the temperature sensors 26 will be describedbelow.

In addition, a second measure is such that the amount of change in timeof the temperature detection data TD is used in addition to thetemperature detection data TD of the temperature sensor 26 in theembodiment. The integrated circuit device 20 of the embodiment includesthe digital signal processing circuit 23 that generates the frequencycontrol data DDS by performing the temperature compensation processusing the neural network calculation process based on the temperaturedetection data TD and the amount of change in time of the temperaturedetection data TD, and the oscillation signal generation circuit 40. Theoscillation signal generation circuit 40 generates an oscillation signalof a frequency set by the frequency control data DDS using the resonator10 in the same manner as the above example.

The amount of change in time of the temperature detection data TDrepresents the amount of change of the temperature detection data TD perpredetermined time. For example, the amount of change in time of thetemperature detection data TD is information related to the differencebetween the temperature detection data corresponding to a process targettiming and the temperature detection data acquired at a timing earlierthan the process target timing (in a narrow sense, the immediatelyprevious timing).

By using the amount of change in time of the temperature detection dataTD as an input of the neural network calculation, whether thetemperature detection data TD is a temperature at the time of increaseor at the time of decrease can be distinguished even in a case where thevalue of the temperature detection data TD is the same. In addition, themagnitude of the amount of change in time represents the rapidness of achange in temperature. Thus, a rapid change in temperature and a gradualchange in temperature can be distinguished. That is, since the neuralnetwork calculation in which heat conduction is considered can beperformed using the amount of change in time, the temperaturecompensation process can be performed with high accuracy.

Hereinafter, the above two combinations will be described. That is, theintegrated circuit device 20 includes the first to N-th (N is an integergreater than or equal to two) temperature sensors 26, the A/D conversioncircuit 27 that performs A/D conversion on the first to N-th temperaturedetection voltages from the first to N-th temperature sensors 26 andoutputs the first to N-th temperature detection data TD1 to TDN, thedigital signal processing circuit 23 that generates the frequencycontrol data by performing the temperature compensation process usingthe neural network calculation process based on the amount of change intime of the i-th temperature detection data TDi among the first to N-thtemperature detection data TD1 to TDN, and the oscillation signalgeneration circuit 40 that generates an oscillation signal of anoscillation frequency corresponding to the frequency control data usingthe resonator 10. Either a configuration that uses the plurality oftemperature sensors 26, or a configuration that uses the amount ofchange in time may not be included.

In addition, the temperature compensation process may be implementedusing only the neural network calculation. However, the number ofneurons needs to be increased in order to increase accuracy, and theamount of information stored in a storage unit 24 (non-volatile memory)is increased.

Thus, in the embodiment, the digital signal processing circuit 23performs the temperature compensation process based on the result of thetemperature compensation calculation based on polynomial approximationand the result of the neural network calculation process. By doing so, ahigh accuracy temperature compensation process can be implemented with areduced memory capacity. Specifically, A2 in FIG. 3 corresponds to theresult of the temperature compensation process in a case wherepolynomial approximation (least squares method) and the neural networkcalculation process are combined. As is understood from A2 in FIG. 3, avery high accuracy temperature compensation process can be implementedin the embodiment.

While the embodiment in which polynomial approximation and the neuralnetwork are combined will be described below, polynomial approximationmay not be performed.

2. CONFIGURATION EXAMPLE

FIG. 7 and FIG. 8 illustrate a configuration example of a resonatordevice 2 (oscillator) that includes the integrated circuit device 20 ofthe embodiment. FIG. 7 is a plan view illustrating the resonator device2 of the embodiment, and FIG. 8 is a sectional view (side view) of theresonator device 2. The resonator device 2 includes the integratedcircuit device 20 (IC) that includes the resonator 10 and a drivecircuit 30 which drives the resonator 10. In addition, the resonatordevice 2 can further include a package 3 on which the resonator 10 andthe integrated circuit device 20 are mounted. The resonator 10 isdisposed on an active surface AF side (circuit element surface side) ofthe integrated circuit device 20. The active surface AF is a surface onwhich an active element (circuit element) such as a transistor of theintegrated circuit device 20 is formed. In FIG. 7 and FIG. 8, adirection from the integrated circuit device 20 toward the resonator 10is denoted by DR1 (first direction). The direction DR1 is a directionthat is orthogonal to a semiconductor substrate of the integratedcircuit device 20. In addition, directions that are orthogonal to thedirection DR1 are denoted by directions DR2 and DR3 (second and thirddirections). For example, the direction DR2 is a direction in the longedge direction of the integrated circuit device 20, and the directionDR3 is a direction in the short edge direction of the integrated circuitdevice 20. The resonator device 2 is not limited to the configurationsin FIG. 7 and FIG. 8. Various modifications can be made such that a partof the constituents is not included, or another constituent is added.

The resonator 10 is an element (resonating element) that generatesmechanical resonance by an electric signal. The resonator 10 can beimplemented by a resonator element (piezoelectric resonator element)such as a quartz crystal resonator element. For example, the resonator10 can be implemented by a quartz crystal resonator element that has acut angle of AT cut or SC cut and generates thickness-shear resonance.For example, the resonator 10 is a resonator incorporated in atemperature compensated oscillator (TCXO) that does not include aconstant temperature chamber. Alternatively, the resonator 10 may be aresonator or the like incorporated in a constant temperature chambertype oscillator (OCXO) that includes a constant temperature chamber. Theresonator 10 of the embodiment can be implemented by various resonatorelements such as a resonator element of a type other than athickness-shear resonance type and a piezoelectric resonator elementformed of a material other than quartz crystal. For example, a surfaceacoustic wave (SAW) resonator or a micro electro mechanical systems(MEMS) resonator as a silicon resonator that is formed using a siliconsubstrate can be employed as the resonator 10.

The resonator 10 includes a resonator element 11 (resonating substrate)and electrodes 12 and 13. The resonator element 11 is formed of apiezoelectric material. For example, the resonator element 11 is formedof quartz crystal. In a case where the surface of the resonator element11 on the opposite side from the integrated circuit device 20 isreferred to as a first surface, and the surface of the resonator element11 on the integrated circuit device 20 side is referred to as a secondsurface, the electrode 12 is formed on the first surface of theresonator element 11, and the electrode 13 is formed on the secondsurface of the resonator element 11. In addition, the resonator 10includes a terminal, not illustrated, and is electrically connected to aterminal of the integrated circuit device 20 through the terminal.

The integrated circuit device 20 has a rectangular shape in a plan viewof the active surface AF and includes a semiconductor substrate. Anactive element such as a transistor is formed on the active surface AFof the semiconductor substrate. In addition, a passive element such as aresistor or a capacitor may be formed on the active surface AF. Therectangular shape referred hereto may not necessarily be a completerectangular shape. The rectangular shape that partially has a projectedshape or a recessed shape or has a curved edge is allowed.

The integrated circuit device 20 includes the drive circuit 30 thatdrives the resonator 10. In addition, the integrated circuit device 20includes a terminal T1 (first terminal) that is electrically connectedto the electrode 12 (first electrode) of the resonator 10 and is wherean output signal is output to the resonator 10 from the drive circuit30, and a terminal T2 (second terminal) that is electrically connectedto the electrode 13 (second electrode) of the resonator 10 and is wherean input signal is input into the drive circuit 30 from the resonator10. In addition, the integrated circuit device 20 further includes aterminal T3 (third terminal) that is not electrically connected to theelectrodes 12 and 13 (first and second electrodes) of the resonator 10.In addition, the integrated circuit device 20 may include terminals TS1and TS2. While an example in which each of TS1 and TS2 includes threeterminals is illustrated in FIG. 7, various modifications can be madefor the specific number of terminals. TS1 or TS2 includes a terminalthat is supplied with a high electric potential side power supplyvoltage VDD. In addition, TS1 or TS2 includes a terminal that issupplied with a low electric potential side power supply voltage VSS(for example, GND). That is, the terminals TS1 and TS2 include a powersupply terminal for power supply, and the integrated circuit device 20operates by the supply of the power supply voltages VDD and VSS. Inaddition, the terminals TS1 and TS2 include a signal terminal wherevarious signals are output or input. For example, the terminals T1 toT3, TS1, and TS2 are called pads of the integrated circuit device 20.Being electrically connected means connection such that an electricsignal is transmitted and delivered through wiring or the like. Beingnot electrically connected means that transmission of an electric signalis blocked, and the electric signal is not delivered.

For example, the integrated circuit device 20 drives the resonator 10 bythe output signal (drive signal) of the drive circuit 30. The drivecircuit 30 is implemented by, for example, an inverting amplificationcircuit (inverter circuit). An output signal OUT of the drive circuit 30is output to the resonator 10 (electrode 12) through the terminal T1. Inaddition, an input signal IN (feedback signal) from the resonator 10(electrode 13) is input into the drive circuit 30 through the terminalT2. Accordingly, an oscillation signal (clock signal) of a predeterminedoscillation frequency can be generated by oscillating the resonator 10.

As illustrated in FIG. 8, the resonator device 2 includes the package 3that is formed of ceramic or the like. The package 3 has anaccommodation space S inside, and the resonator 10 and the integratedcircuit device 20 are accommodated in the accommodation space S. Theaccommodation space S is airtightly sealed and is in a depressurizedstate (desirably, a state similar to a vacuum). The package 3 enablesthe resonator 10 and the integrated circuit device 20 to be properlyprotected from impact, dust, heat, moisture, and the like. The package 3includes a base 4 and a lid 5. Specifically, the package 3 is configuredwith the base 4 that supports the resonator 10 and the integratedcircuit device 20, and the lid 5 that is joined to the upper surface ofthe base 4 such that the accommodation space S is formed between thebase 4 and the lid 5.

As illustrated in the sectional view of FIG. 8, the base 4 includes afirst recess portion and a second recess portion inside. The firstrecess portion is open on the upper surface of the base 4. The secondrecess portion is open on the bottom surface of the first recessportion. Step portions 6 and 7 are disposed on the bottom surface of thefirst recess portion. Internal terminals TI1 and TI2 of the resonatordevice 2 are formed in the step portions 6 and 7. The internal terminalsTI1 and TI2 are electrically connected to external terminals TE1 and TE2of the resonator device 2 through internal wiring (not illustrated) ofthe package 3. The external terminals TE1 and TE2 are formed on theouter bottom surface of the package 3. The external terminals TE1 andTE2 are connected to external devices through external wiring (wiringand the like of a circuit substrate). For example, the terminals TS1 andTS2 are disposed in the integrated circuit device 20, and conductivebumps BS1 and BS2 are disposed in the signal terminals TS1 and TS2. Asillustrated in FIG. 8, the conductive bumps BS1 and BS2 of the signalterminals TS1 and TS2 are connected in contact to the internal terminalsTI1 and TI2 of the resonator device 2. Accordingly, the signal terminalsTS1 and TS2 of the integrated circuit device 20 are electricallyconnected to the external terminals TE1 and TE2 of the resonator device2.

FIG. 7 is a plan view of the active surface AF of the integrated circuitdevice 20 and, for example, is a view seen from a direction opposite tothe direction DR1. In the plan view of the active surface AF, theterminals T1, T2, and T3 of the integrated circuit device 20 arearranged to overlap with the resonator 10. As illustrated in thesectional view (a view seen from the direction DR3) of FIG. 8, theresonator 10 and the integrated circuit device 20 are attached to eachother as a stack in their thickness direction. A unit in which theresonator 10 and the integrated circuit device 20 are attached to eachother as a stack is called a resonator unit 9 (stack body).

As illustrated in FIG. 8, conductive bumps BU1, BU2, and BU3 (connectionbumps) are disposed in the terminals T1, T2, and T3 of the integratedcircuit device 20. The conductive bumps BU1, BU2, and BU3 are connectionelectrodes of a protrusion shape that are formed on the terminals T1,T2, and T3. For example, the conductive bumps BU1, BU2, and BU3 aremetal bumps (gold bumps, silver bumps, copper bumps, or the like) formedof metal. A modification can be made such that a resin core bump that isconfigured by plating the core of a bump formed of resin with metal isused as the conductive bump.

The terminal T1 is electrically connected to the electrode 12 of theresonator 10 through a conductive bump B1. Specifically, as illustratedin FIG. 7 and FIG. 8, wiring 16 that is connected to the electrode 12,and a first connection terminal, not illustrated, that is connected tothe wiring 16 are disposed in the resonator 10. The terminal T1 and theelectrode 12 are electrically connected to each other through theconductive bump B1, the first connection terminal, and the wiring 16 byconnecting the conductive bump B1 of the terminal T1 to the firstconnection terminal. In addition, the terminal T2 is electricallyconnected to the electrode 13 of the resonator 10 through a conductivebump B2. Specifically, wiring 17 that is connected to the electrode 13,and a second connection terminal, not illustrated, that is connected tothe wiring 17 are disposed in the resonator 10. In FIG. 7, the electrode13 and the wiring 17 are illustrated by dotted lines. The terminal T2and the electrode 13 are electrically connected to each other throughthe conductive bump B2, the second connection terminal, and the wiring17 by connecting the conductive bump B2 of the terminal T2 to the secondconnection terminal. While a case where the terminal T1 and theelectrode 12 are electrically connected to each other, and the terminalT2 and the electrode 13 are electrically connected to each other isdescribed above, the embodiment is not limited thereto. The terminal T1and the electrode 13 may be electrically connected to each other, andthe terminal T2 and the electrode 12 may be electrically connected toeach other. For example, the electrode 13 may be the first electrode,and the electrode 12 may be the second electrode.

Meanwhile, the terminal T3 of the integrated circuit device 20 is adummy terminal that is not electrically connected to the electrodes 12and 13 of the resonator 10. For example, the conductive bump BU3 isformed in the terminal T3. The conductive bump BU3 is in contact withthe resonator 10 but is not electrically connected to the electrodes 12and 13 of the resonator 10. For example, the terminals T1 and T2 of theintegrated circuit device 20 are connected to the first and secondconnection terminals of the resonator 10, but the terminal T3 is notconnected to the first and second connection terminals.

The resonator 10 is supported on the active surface AF side of theintegrated circuit device 20 using the conductive bumps BU1, BU2, andBU3 disposed in the terminals T1, T2, and T3. For example, theconductive bumps BU1, BU2, and BU3 (and the terminals T1, T2, and T3)are support members, and the resonator 10 is supported (supported atthree points) by the integrated circuit device 20.

FIG. 9 is another descriptive diagram of the resonator device 2, andFIG. 10 is a sectional view illustrating the resonator device 2 in astate where the resonator device 2 is mounted on the package 3. In theresonator device 2 of the embodiment illustrated in FIG. 9, a relaysubstrate 100 is disposed between the resonator 10 and the integratedcircuit device 20. For example, the resonator 10, the relay substrate100, and the integrated circuit device 20 are attached to each other asa stack in their thickness direction. A unit in which the resonator 10,the relay substrate 100, and the integrated circuit device 20 areattached to each other as a stack is called the resonator unit 9 (stackbody). Wiring 111 for electrically connecting the terminal T1 of theintegrated circuit device 20 to the electrode 12 of the resonator 10 andwiring 115 for electrically connecting the terminal T2 of the integratedcircuit device 20 to the electrode 13 of the resonator 10 are formed inthe relay substrate 100. The wiring 111 and the wiring 115 areelectrically connected to terminals of the resonator 10 throughconductive bumps BT1 and BT2 that are disposed on the resonator 10 sidesurface of the relay substrate 100. The terminals of the resonator 10are connected to the electrodes 12 and 13. Accordingly, the terminals T1and T2 for driving the integrated circuit device 20 are electricallyconnected to the electrodes 12 and 13 of the resonator 10. The resonator10 performs an oscillation operation by applying a drive voltage betweenthe terminals T1 and T2. Accordingly, the relay substrate 100 is asubstrate that relays electrical connection between the resonator 10 andthe integrated circuit device 20.

The relay substrate 100 has a function of hindering transmission ofstress caused by deformation of the integrated circuit device 20 or thepackage 3 to the resonator 10. For example, the relay substrate 100 canbe implemented by a quartz crystal substrate. For example, the relaysubstrate 100 is formed by patterning the quartz crystal substrate byetching (for example, wet etching). The relay substrate 100 may beimplemented by a piezoelectric substrate, a silicon substrate, a resinsubstrate, a metal substrate, a ceramic substrate, or the like otherthan the quartz crystal substrate. By interposing the relay substrate100 between the resonator and the integrated circuit device 20,deformation (stress) caused by heat distortion or the like of theintegrated circuit device 20 or the package 3 is not easily transmittedto the resonator 10, and a decrease in the resonating characteristics ofthe resonator 10 can be reduced.

In addition, in the resonator device 2 in FIG. 9 and FIG. 10, theintegrated circuit device 20 includes terminals T3 and T4 (third andfourth terminals) that are not electrically connected to the electrodes12 and 13 (first and second electrodes) of the resonator 10. Theresonator 10 is supported on the active surface AF side of theintegrated circuit device 20 using conductive bumps BU1, BU2, BU3, andBU4 disposed in the terminals T1, T2, T3, and T4. Specifically, theresonator 10 is supported on the active surface AF side of theintegrated circuit device 20 through the relay substrate 100 that issupported by the conductive bumps BU1, BU2, BU3, and BU4 of theterminals T1, T2, T3, and T4 of the integrated circuit device 20. Asillustrated in FIG. 7 to FIG. 10, the number of terminals for supportingthe resonator 10 or the relay substrate 100 may be three or may be four.Alternatively, the resonator 10 or the relay substrate 100 may besupported using five or more terminals.

FIG. 11 illustrates a configuration example of the integrated circuitdevice 20. The integrated circuit device includes an output circuit 22,the digital signal processing circuit 23, the storage unit 24 (memory),the temperature sensors 26, the A/D conversion circuit 27, and theoscillation signal generation circuit 40. In addition, the integratedcircuit device 20 includes the terminals T1 and T2. The integratedcircuit device 20 is not limited to the configuration in FIG. 11.Various modifications can be made such that a part of the constituentsis not included, or another constituent is added.

Each temperature sensor 26 outputs a temperature-dependent voltage asthe temperature detection voltage. The temperature-dependent voltagechanges depending on the ambient (for example, the integrated circuitdevice 20 or the resonator 10) temperature. For example, eachtemperature sensor 26 generates the temperature-dependent voltage usinga circuit element having temperature dependence and outputs thetemperature-dependent voltage with a temperature-independent voltage(for example, a band gap reference voltage) as a reference. For example,a PN junction forward voltage is output as the temperature-dependentvoltage.

The A/D conversion circuit 27 performs A/D conversion on the temperaturedetection voltage from the temperature sensors 26 and outputs the resultof A/D conversion as the temperature detection data TD. For example, asuccessive comparison type, a flash type, a pipeline type, or a doubleintegral type can be employed as an A/D conversion scheme.

The digital signal processing circuit 23 performs various types ofsignal processing. For example, the digital signal processing circuit 23(temperature compensation unit) performs the temperature compensationprocess of compensating the temperature characteristics of theoscillation frequency of the resonator 10 based on the temperaturedetection data TD and outputs the frequency control data DDS forcontrolling the oscillation frequency. Details of the temperaturecompensation process will be described below.

The digital signal processing circuit 23 can be implemented by a digitalsignal processor (DSP) that executes various types of signal processingincluding the temperature compensation process in a time divisionmanner. Alternatively, the digital signal processing circuit 23 may beimplemented by an ASIC circuit such as a gate array based on automaticplace and route or may be implemented by a processor (for example, a CPUor an MPU) and a program that operates on the processor. In addition,the digital signal processing circuit 23 may perform a correctionprocess (for example, aging correction) other than temperaturecompensation. In addition, the digital signal processing circuit 23 maycontrol a heater (open control) or the like of the constant temperaturechamber in the constant temperature chamber type oscillator (OCXO).

The storage unit 24 stores various data including data for thetemperature compensation process. The storage unit 24 may be implementedby a semiconductor memory such as a RAM (SRAM or DRAM) or may beimplemented by a non-volatile memory.

The oscillation signal generation circuit 40 includes a D/A conversioncircuit 25 and an oscillation circuit 21. The D/A conversion circuit 25performs D/A conversion on the frequency control data DDS and outputs acontrol voltage corresponding to the frequency control data DDS to theoscillation circuit 21. The oscillation circuit is a circuit thatincludes the drive circuit 30 and oscillates the resonator 10 by drivingthe resonator 10 using the drive circuit 30. It is desirable to disposea variable capacitance circuit for a connection node of at least one ofan output node or an input node of the drive circuit 30. For example,the variable capacitance circuit is a varactor of which the capacitancevalue changes based on the control voltage from the D/A conversioncircuit 25. Various modifications can be made to the oscillation signalgeneration circuit 40 as will be described below using FIG. 26.

The output circuit 22 (buffer circuit) performs buffering of theoscillation signal generated by the oscillation signal generationcircuit 40 (oscillation circuit 21) and outputs a signal afterbuffering. That is, buffering for sufficiently driving an external loadis performed. For example, the signal after buffering is a clipped sinewave signal. The signal may be a rectangular wave signal. Alternatively,the output circuit 22 may be a circuit that can output both of theclipped sine wave signal and the rectangular wave signal.

Next, the arrangement of the temperature sensors 26 in the integratedcircuit device 20 will be described. As described above, in thetemperature compensation process, the difference between the temperature(temperature detection data TD) detected by the temperature sensors 26and the temperature of the resonator 10 is a cause of decrease inaccuracy. Thus, in the embodiment, the temperature sensors 26 aredisposed in the vicinity of the heat conduction path between theintegrated circuit device and the resonator 10. Accordingly, thetemperature detection data from the temperature sensors 26 is acquiredas information that reflects heat conduction between the integratedcircuit device 20 and the resonator 10. Thus, an improvement in theaccuracy of the temperature compensation process can be expected.

FIG. 12 is a diagram for describing the arrangement of the temperaturesensors 26. For example, the integrated circuit device 20 includes afirst oscillation terminal that is connected to one of the input node orthe output node of the drive circuit 30, a second oscillation terminalthat is connected to the other of the input node or the output node ofthe drive circuit 30, a power supply terminal to which a power supplyvoltage is supplied, and an output terminal from which an oscillationsignal is output. The first oscillation terminal corresponds to theterminal T1, and the second oscillation terminal corresponds to theterminal T2. In addition, the power supply terminal and the outputterminal are terminals included in the terminal TS1 or TS2.

As illustrated in FIG. 12, the first temperature sensor 26-1 included inthe integrated circuit device 20 is arranged at a position closer to T1than any terminal of TS1 or TS2. That is, a distance D11 between thefirst temperature sensor 26-1 and the first oscillation terminal T1 issmaller than a distance D12 between the first temperature sensor 26-1and TS1 and a distance D13 between the first temperature sensor 26-1 andTS2. That is, the distance between the first temperature sensor 26-1 andthe first oscillation terminal is smaller than at least one of thedistance between the first temperature sensor 26-1 and the power supplyterminal or the distance between the first temperature sensor 26-1 andthe output terminal. The distance between the first temperature sensor26-1 and the first oscillation terminal, the distance between the firsttemperature sensor 26-1 and the power supply terminal, and the distancebetween the first temperature sensor 26-1 and the output terminal referto the shortest distance between the first temperature sensor 26-1 andthe first oscillation terminal, the shortest distance between the firsttemperature sensor 26-1 and the power supply terminal, and the shortestdistance between the first temperature sensor 26-1 and the outputterminal, respectively. In addition, the second temperature sensor 26-2is arranged at a position closer to T2 than any terminal of TS1 or TS2.That is, a distance D21 between the second temperature sensor 26-2 andthe second oscillation terminal T2 is smaller than a distance D22between the second temperature sensor 26-2 and TS1 and a distance D23between the second temperature sensor 26-2 and TS2. That is, thedistance between the second temperature sensor 26-2 and the secondoscillation terminal is smaller than at least one of the distancebetween the second temperature sensor 26-2 and the power supply terminalor the distance between the second temperature sensor 26-2 and theoutput terminal. The distance between the second temperature sensor 26-2and the second oscillation terminal, the distance between the secondtemperature sensor 26-2 and the power supply terminal, and the distancebetween the second temperature sensor 26-2 and the output terminal referto the shortest distance between the second temperature sensor 26-2 andthe second oscillation terminal, the shortest distance between thesecond temperature sensor 26-2 and the power supply terminal, and theshortest distance between the second temperature sensor 26-2 and theoutput terminal, respectively. FIG. 12 illustrates an example in whichthe distance between the first temperature sensor 26-1 and the firstoscillation terminal is smaller than any of the distance between thefirst temperature sensor 26-1 and the output terminal or the distancebetween the first temperature sensor 26-1 and the power supply terminal.Similarly, FIG. 12 illustrates an example in which the distance betweenthe second temperature sensor 26-2 and the second oscillation terminalis smaller than any of the distance between the second temperaturesensor 26-2 and the output terminal or the distance between the secondtemperature sensor 26-2 and the power supply terminal.

As illustrated in FIG. 7 to FIGS. 10, T1 and T2 (BU1 and BU2) aremembers supporting the resonator 10 or the relay substrate 100 andconstitute the heat conduction path between the integrated circuitdevice 20 and the resonator 10. Thus, by disposing the temperaturesensors 26 (26-1 and 26-2) at a position relatively closer to T1 or aposition closer to T2 with respect to other terminals (TS1 and TS2), ahigh accuracy temperature compensation process can be implemented.Particularly, since T1 and T2 are terminals necessary for driving theresonator 10, the likelihood that T1 and T2 constitute the heatconduction path is significantly high, and it is important to disposethe temperature sensors 26 in the vicinity of T1 and T2. While theembodiment is configured such that the distance between the firsttemperature sensor 26-1 and the first oscillation terminal is smallerthan any of the distance between the first temperature sensor 26-1 andthe output terminal or the distance between the first temperature sensor26-1 and the power supply terminal, the accuracy of the temperaturecompensation process can be improved as long as the distance between thefirst temperature sensor 26-1 and the first oscillation terminal issmaller than one of the distance between the first temperature sensor26-1 and the output terminal or the distance between the firsttemperature sensor 26-1 and the power supply terminal. The same appliesto the second temperature sensor 26-2.

In addition, the integrated circuit device 20 includes a supportterminal. The support terminal may be the terminal T3 in which anelectrode for supporting the resonator 10 is formed in FIG. 7, or may bethe terminals T3 and T4 in which electrodes for supporting the relaysubstrate 100 are formed in FIG. 9.

As illustrated in FIG. 12, a third temperature sensor 26-3 is arrangedat a position closer to T3 than any terminal of TS1 or TS2. That is, adistance D31 between the third temperature sensor 26-3 and the supportterminal T3 is smaller than a distance D32 between the third temperaturesensor 26-3 and TS1 and a distance D33 between the third temperaturesensor 26-3 and TS2. That is, the distance between the third temperaturesensor 26-3 and the support terminal is smaller than at least one of thedistance between the third temperature sensor 26-3 and the power supplyterminal or the distance between the third temperature sensor 26-3 andthe output terminal. The distance between the third temperature sensor26-3 and the support terminal, the distance between the thirdtemperature sensor 26-3 and the power supply terminal, and the distancebetween the third temperature sensor 26-3 and the output terminal referto the shortest distance between the third temperature sensor 26-3 andthe support terminal, the shortest distance between the thirdtemperature sensor 26-3 and the power supply terminal, and the shortestdistance between the third temperature sensor 26-3 and the outputterminal, respectively. While the terminal T3 is a terminal that is notused in electrical connection, the terminal T3 supports the resonator 10or the relay substrate 100. Thus, since T3 also constitutes the heatconduction path, the temperature sensors 26 may be disposed in thevicinity of T3. FIG. 12 illustrates an example in which the integratedcircuit device 20 includes a fourth temperature sensor 26-4 that isarranged at a position closer to T4 than any terminal of TS1 or TS2.While the embodiment is configured such that the distance between thethird temperature sensor 26-3 and the support terminal is smaller thanany of the distance between the third temperature sensor 26-3 and theoutput terminal or the distance between the third temperature sensor26-3 and the power supply terminal, the accuracy of the temperaturecompensation process can be improved as long as the distance between thethird temperature sensor 26-3 and the support terminal is smaller thanone of the distance between the third temperature sensor 26-3 and theoutput terminal or the distance between the third temperature sensor26-3 and the power supply terminal. The same applies to the fourthtemperature sensor 26-4. In a case where a plurality of supportterminals are disposed, each support terminal may constitute the heatconduction path. Thus, by disposing the temperature sensors 26 in thevicinity of each support terminal, an improvement in the accuracy of thetemperature compensation process can be expected. Various modificationscan be made such that the fourth temperature sensor 26-4 is notincluded.

3. CALCULATION PROCESS FOR FREQUENCY CONTROL DATA

Next, the temperature compensation process according to the embodiment,that is, a calculation process for the frequency control data DDS, willbe described. First, an outline of the neural network calculation willbe described, and then, a method of the embodiment will be described.

3.1 Outline of Neural Network Calculation

FIG. 13 is a basic structure example of the neural network. The neuralnetwork is a mathematical model that simulates brain functions on acomputer. One circle (node) in FIG. 13 is called a neuron. In theexample in FIG. 13, the neural network includes an input layer (I), twohidden layers (H1 and H2), and an output layer (O). The number ofneurons in the input layer is three. The number of neurons in eachhidden layer is four. The number of neurons in the output layer is one.Various modifications can be made to the number of hidden layers(intermediate layers) or the number of neurons included in each layer.Each neuron included in the input layer is coupled to the neurons in thefirst hidden layer (H1). The neurons included in the first hidden layerare coupled to the neurons in the second hidden layer (H2), and theneurons included in the second hidden layer are coupled to the neuron inthe output layer.

The input layer includes neurons, each of which outputs an input value.In the example in FIG. 13, the neural network receives x1, x2, and x3 asinput and the neurons in the input layer output x1, x2, and x3,respectively. Any type of preprocessing may be performed on the inputvalue, and each neuron in the input layer may output the value afterpreprocessing.

In each neuron from the hidden layers (intermediate layers), calculationthat imitates a state where information as an electric signal istransmitted in a brain is performed. In the brain, the transmittabilityof information changes depending on the coupling strength betweensynapses. Thus, the coupling strength is denoted by a weight W in theneural network.

In FIG. 13, W1 is the weight between the input layer and the firsthidden layer. W1 denotes a set of weights between a given neuronincluded in the input layer and a given neuron included in the firsthidden layer. In a case where the weight between a p-th neuron in theinput layer and a q-th neuron in the first hidden layer is denoted by w1pq, W1 in FIG. 13 is information that includes 12 weights of w111 tow134. In a wider sense, the weight W1 is information that includes thenumber of weights corresponding to the product of the number of neuronsin the input layer and the number of neurons in the first hidden layer.

In the first neuron in the first hidden layer, calculation illustratedin Expression (1) is performed. That is, in one neuron, amultiply-accumulate calculation is performed on the outputs of theneurons in the immediately previous layer connected to the neuron, andcalculation of adding a bias (b1) is performed.

$\begin{matrix}{h_{1} = {f\left( {{\sum\limits_{i}{w_{i\; 1}^{1} \cdot x_{i}}} + b_{1}} \right)}} & (1)\end{matrix}$

In addition, as illustrated in Expression (1), in the calculation in oneneuron, an activation function f that is a non-linear function is used.For example, the activation function f uses a ReLU function illustratedin Expression (2). The ReLU function is a function of which the value isequal to zero in a case where a variable is smaller than or equal tozero, and is equal to the variable in a case where the variable isgreater than zero. It is known that various functions can be used as theactivation function f. A sigmoid function may be used, or a functionacquired by improving the ReLU function may be used. While a calculationexpression for h1 is illustrated in Expression (1), the same calculationmay be performed in other neurons in the first hidden layer.

$\begin{matrix}{{f(x)} = {{\max \left( {0,x} \right)} = \left\{ \begin{matrix}{0\mspace{11mu} \left( {x \leq 0} \right)} \\{x\mspace{11mu} \left( {x \geq 0} \right)}\end{matrix} \right.}} & (2)\end{matrix}$

In addition, the same applies to the subsequent layers. For example, ina case where the weight between the first hidden layer and the secondhidden layer is denoted by W2, a multiply-accumulate calculation thatuses the output of the first hidden layer and the weight W2, andcalculation of adding a bias and applying the activation function areperformed in the neurons in the second hidden layer.

In the neuron in the output layer, calculation of weighting and addingthe output of the immediately previous layer (in the example in FIG. 13,the second hidden layer) and adding a bias is performed. In the neuralnetwork, the result of the calculation in the output layer is the outputof the neural network. Alternatively, the result of any type ofpostprocessing performed on the result of the calculation in the outputlayer may be output.

As is understood from the above description, an appropriate weight andan appropriate bias need to be set (learned) in order to acquire adesired output from the input. In the learning, multiple sets of a giveninput x and a correct output t (training data) of the input areprepared. The learning process of the neural network can be consideredas a process of obtaining the most reliable weight and the most reliablebias for the multiple training data. Backpropagation is widely known asthe learning process of the neural network.

FIG. 14 is a diagram for describing the backpropagation. In FIG. 14, aprocess that is focused on one neuron in each of the first hidden layer,the second hidden layer, and the output layer is illustrated forsimplification of description. In the backpropagation, parameters (theweight and the bias) are updated by repeating a forward pass and abackward pass. First, an output y is calculated using the input x andthe weight and the bias at that point of time. The initial values of theweight and the bias can be set in various manners. In the example inFIG. 14, calculation in Expressions (3) to (5) is performed, and y iscalculated from xk. In Expressions (3) to (5), u denotes the output ofthe first hidden layer, and v denotes the output of the second hiddenlayer.

$\begin{matrix}{y = {{\sum\limits_{k = 1}^{n}\left( {w_{k}^{3} \cdot v_{k}} \right)} + b}} & (3) \\{v = {f\left( {{\sum\limits_{k = 1}^{n}\left( {w_{k}^{2} + u_{k}} \right)} + b^{2}} \right)}} & (4) \\{u = {f\left( {{\sum\limits_{k = 1}^{n}\left( {w_{k}^{1} \cdot x_{k}} \right)} + b^{1}} \right)}} & (5)\end{matrix}$

A loss function E is obtained based on the obtained output y andtraining data t corresponding to the input x. For example, the lossfunction E is in Expression (6). The loss function E may be a simpledifference (y−t), or other loss functions may be used. A processperformed up to the obtaining of the loss function E is called a forwardpass.

$\begin{matrix}{E = {\frac{1}{2}\left( {y - t} \right)^{2}}} & (6)\end{matrix}$

After the loss function E is obtained by the forward pass, eachparameter is updated using a partial derivative of the loss function Eas illustrated in Expressions (7) to (12). In Expressions (7) to (12), avalue that is suffixed with “+1” denotes a value after the updateprocess. For example, b+1 denotes the value of b after the updateprocess. In addition, η denotes a learning rate. It is desirable thatthe learning rate is not constant and is changed depending on the statusof learning.

$\begin{matrix}{b_{+ 1} = {b - {\eta \frac{\partial E}{\partial b}}}} & (7) \\{w_{k + 1}^{3} = {w_{k}^{3} - {\eta \frac{\partial E}{\partial w_{k}^{3}}}}} & (8) \\{b_{k + 1}^{2} = {b_{k}^{2} - {\eta \frac{\partial E}{\partial b_{k}^{2}}}}} & (9) \\{w_{k + 1}^{2} = {w_{k}^{2} - {\eta \frac{\partial E}{\partial w_{k}^{2}}}}} & (10) \\{b_{k + 1}^{1} = {b_{k}^{1} - {\eta \frac{\partial E}{\partial b_{k}^{1}}}}} & (11) \\{w_{k + 1}^{1} = {w_{k}^{1} - {\eta \frac{\partial E}{\partial w_{k}^{1}}}}} & (12)\end{matrix}$

At this point, the partial derivative of the loss function E related toeach parameter is calculated from the output layer toward the inputlayer using a chain rule. Specifically, each partial derivativeillustrated in Expressions (7) to (12) can be easily obtained bysequentially calculating Expressions (13) to (18). In addition, in acase where the ReLU function in Expression (2) is used as the activationfunction f, the derivative value is either zero or one. Thus, thepartial derivative is easily calculated. A series of processes that useExpressions (7) to (18) is called a backward pass.

$\begin{matrix}{\frac{\partial E}{\partial b} = {{\frac{\partial E}{\partial y} \cdot \frac{\partial y}{\partial b}} = \left( {y - t} \right)}} & (13) \\{\frac{\partial E}{\partial w_{k}^{3}} = {{\frac{\partial E}{\partial y}\frac{\partial y}{\partial w_{k}^{3}}} = {\left( {y - t} \right) \cdot v_{k}}}} & (14) \\{\frac{\partial E}{\partial b_{k}^{2}} = {{\frac{\partial E}{\partial y} \cdot \frac{\partial y}{\partial v_{k}} \cdot \frac{\partial v_{k}}{\partial b_{k}^{2}}} = {\left( {y - t} \right) \cdot w_{k}^{3} \cdot {f^{\prime}\left( v_{k} \right)}}}} & (15) \\{\frac{\partial E}{\partial w_{k}^{2}} = {{\frac{\partial E}{\partial y} \cdot \frac{\partial y}{\partial v_{k}} \cdot \frac{\partial v_{k}}{\partial w_{k}^{2}}} = {\left( {y - t} \right) \cdot w_{k}^{3} \cdot {f^{\prime}\left( v_{k} \right)} \cdot u_{k}}}} & (16) \\{\frac{\partial E}{\partial b_{k}^{1}} = {{\frac{\partial E}{\partial y} \cdot \frac{\partial y}{\partial v_{k}} \cdot \frac{\partial v_{k}}{\partial u_{k}} \cdot \frac{\partial u_{k}}{\partial b_{k}^{1}}} = {\left( {y - t} \right) \cdot w_{k}^{3} \cdot {f^{\prime}\left( v_{k} \right)} \cdot w_{k}^{2} \cdot {f^{\prime}\left( u_{k} \right)}}}} & (17) \\{\frac{\partial E}{\partial w_{k}^{1}} = {{\frac{\partial E}{\partial y} \cdot \frac{\partial y}{\partial v_{k}} \cdot \frac{\partial v_{k}}{\partial u_{k}} \cdot \frac{\partial u_{k}}{\partial w_{k}^{1}}} = {\left( {y - t} \right) \cdot w_{k}^{3} \cdot {f^{\prime}\left( v_{k} \right)} \cdot w_{k}^{2} \cdot {f^{\prime}\left( u_{k} \right)} \cdot x_{k}}}} & (18)\end{matrix}$

In the learning process, the forward pass and the backward pass arerepeatedly executed until it is determined that the parameters converge.In a case where the neural network calculation is applied to thetemperature compensation process, the values of the weight and the biasare learned such that appropriate frequency control data DDScorresponding to temperature is output. The result of learning is storedin the storage unit 24 (memory). When the temperature compensationprocess is executed (when an estimation process is performed),calculation illustrated in Expression (1) is performed based on inputdata and the stored parameters, and calculation of obtaining thefrequency control data DDS as output data is performed.

3.2 Neural Network Calculation of Embodiment

In the embodiment, a higher accuracy temperature compensation process isperformed. Thus, the frequency control data DDS is obtained using theneural network that takes the temperature detection data TD1 to TDN fromthe first to N-th temperature sensors 26 and the amount of change intime of the temperature detection data TD as input. In addition, in theembodiment, a high accuracy temperature compensation process isimplemented with a reduced number of neurons by combining polynomialapproximation (least squares method) with the neural networkcalculation. However, not all the temperature detection data TD1 to TDNfrom the first to N-th temperature sensors 26 need to be used. Thetemperature detection data from a single temperature sensor may be used.

Specifically, in a case where the temperature detection data of thefirst to N-th temperature sensors 26 are denoted by TD1 to TDN, inputcandidates are the amount of change in time of the temperature detectiondata and the repeatedly multiplied temperature detection data. In thecase of the temperature detection data TD1 of the first temperaturesensor 26 (26-1), the input candidates are not only TD1 but also TD1̂2,TD1̂3, . . . , TD1̂M, and ΔTD1. The amount of change in time of TD1 isdenoted by ΔTD1. For example, ΔTD1 is the difference in value betweenTD1 at a given timing (the most recent timing) and TD1 at a timing inthe past (the immediately previous timing). Similarly, in the case ofthe i-th temperature detection data TDi, the input candidates are TDi,TDî2, . . . , TDîM, and ΔTDi. That is, in the embodiment, M+1 pieces ofdata can be used as input for one temperature sensor 26, and totalN×(M+1) pieces of data can be used as input.

While N is, for example, approximately six, and M is, for example,approximately five, various modifications can be made to the number oftemperature sensors 26 or the upper limit value of the exponent. Inaddition, the amount of change in time is not limited to the differencein value between the most recent two timings. The difference between themost recent timing and the second previous or earlier timing may be setas the amount of change in time. The average value or the like of aplurality of differences in value may be set as the amount of change intime. The result of a filter process performed on the difference invalue may be set as the amount of change in time. In addition, thenumber of amounts of change in time set as the input candidates is notlimited to one. A plurality of amount of change in time may be set asthe input candidates among the above various amounts of change in time.

In the neural network calculation of the digital signal processingcircuit 23, all of the input candidates may be used as input. However,in a case where the number of inputs is increased, the number of piecesof data included in the weight W1 between the input layer and the firsthidden layer is increased. Thus, the amount of data stored in thestorage unit 24 is increased. Thus, a part of the input candidates maybe used as the input of the neural network. Hereinafter, data that isselected as the input of the neural network among the input candidateswill be referred to as input data Xin. In order to improve the accuracyof the temperature compensation process, it is necessary to satisfy atleast one of inclusion of data based on two or more pieces oftemperature detection data in the input data Xin, or inclusion of one ormore amounts of change in time in the input data Xin. Consideringaccuracy, it is desirable to satisfy both conditions.

The learning process of the neural network in the embodiment will bedescribed. First, in the inspection step, a temperature sweep isperformed in the constant temperature chamber, and actual measurementdata is acquired. For example, the temperature sweep is performed withina range of −40° C. to 125° C. as illustrated in FIG. 4.

FIG. 15 is a graph representing a change in time of the temperaturedetection data TD1 to TDN of the first to N-th temperature sensors 26actually measured in the inspection step. In FIG. 15, a horizontal axisdenotes time, and a vertical axis denotes the value of the temperaturedetection data. FIG. 15 illustrates two pieces of temperature detectiondata for simplification of description.

FIG. 15 corresponds to an example in which the temperature sweep thatchanges the constant temperature chamber from a low temperature to ahigh temperature is performed. The temperature detection data of eachtemperature sensor 26 is increased along with time. However, since thetemperature detection data is affected by the position of the heatsource, the position at which each temperature sensor 26 is arranged,the heat conduction path, and the like, specific values (waveforms) ofgiven temperature detection data and another temperature detection dataare different from each other.

In a case where a change in time of the temperature detection data TD isknown as in FIG. 15, a change in time of the input data Xin of theneural network can be obtained. Specifically, repeated multiplicationdata is obtained by repeatedly multiplying the temperature detectiondata at each timing. In addition, the amount of change in time isobtained by calculating the derivative of the graph in FIG. 15(obtaining the difference between adjacent data). That is, a change intime of the input data Xin can be obtained based on the actuallymeasured temperature detection data TD.

In addition, in the inspection step, the frequency of the oscillationsignal (the oscillation frequency of the resonator 10) output by theoscillation signal generation circuit 40 during the temperature sweep ismeasured. FIG. 16 is a graph representing a change in time of thefrequency of the oscillation signal actually measured in the inspectionstep. The frequency control data DDS for outputting an oscillationsignal of a desired frequency can be obtained by combining the actuallymeasured information in FIG. 16 with the temperature characteristics ofthe oscillation signal generation circuit 40 (for example, thetemperature characteristics of the varactor illustrated in FIG. 2). Thatis, a change in time of the frequency control data DDS can be obtainedbased on the actually measured data. The temperature characteristics ofthe varactor may be measured during the temperature sweep or may beseparately measured.

As described above, the mutual relationship among the temperaturedetection data TD, the input data Xin, the oscillation frequency, andthe frequency control data DDS can be obtained using data actuallymeasured in the inspection step and a calculation process based on thedata.

In the embodiment, the relationship between the input data Xin and thefrequency control data DDS is used in the learning process. In thelearning process, the accuracy of learning can be increased by preparingmultiple pieces of training data. Thus, a plurality of pieces oflearning data may be extracted from data that is acquired in onetemperature sweep. In addition, considering heat conduction, thetemperature sweep may not be performed once, and a plurality oftemperature sweeps may be performed.

For example, the learning process is performed by an informationprocessing apparatus (PC or the like) that is different from theintegrated circuit device 20 according to the embodiment. In theembodiment, the learning process of the neural network may be performedusing the input data Xin and the frequency control data DDS. In the caseof performing such a learning process, the frequency control data DDS isdirectly calculated by the neural network calculation process.

However, the embodiment combines polynomial approximation with theneural network, considering a decrease in the number of neurons.Specifically, a brief temperature compensation process is performedbased on polynomial approximation, and an error that cannot becompensated by polynomial approximation is compensated by the neuralnetwork calculation.

FIG. 17 is a schematic diagram for describing the flow of temperaturecompensation process in the embodiment. The digital signal processingcircuit 23 of the embodiment obtains first frequency control data DDS1by performing the neural network calculation that takes the input dataXin based on the plurality of pieces of temperature detection data TD1to TDN as input, and obtains second frequency control data DDS2 byperforming polynomial approximation that takes given temperaturedetection data as input. The digital signal processing circuit 23outputs the sum of the first frequency control data DDS1 and the secondfrequency control data DDS2 as the final frequency control data DDS tothe oscillation signal generation circuit 40.

The neural network in the example in FIG. 17 needs to learn the weightand the bias such that the first frequency control data DDS1 is outputbased on the input data Xin. That is, the frequency control data DDScorresponding to the input data Xin cannot be used as the training data,and the first frequency control data DDS1 corresponding to the inputdata Xin has to be used as the training data.

Thus, in the learning process, first, the relationship between thetemperature detection data TD and the frequency control data DDS issubjected to polynomial approximation using the least squares method,and a coefficient of the polynomial is determined. The polynomialapproximation may have a certain degree of accuracy. For example, acubic polynomial is used. In addition, the temperature detection data TDas a variable of the polynomial may be any of the first to N-thtemperature detection data TD1 to TDN or may be a statistical quantitysuch as an average value.

After the coefficient of the polynomial is obtained, the frequencycontrol data (second frequency control data DDS2) based on thepolynomial approximation is obtained using the temperature detectiondata TD and the polynomial. The difference between the frequency controldata DDS obtained based on the actual measurement data (FIG. 16) and thesecond frequency control data DDS2 based on the polynomial approximationis the training data of the first frequency control data DDS1 to beoutput by the neural network. Thus, in the learning process, with thedifference as training data, the weight and the bias are learned bybackpropagation or the like described above using FIG. 14.

After the learning is completed, the coefficient of the polynomial inthe polynomial approximation and the weight and the bias in the neuralnetwork calculation are written into the storage unit 24 (non-volatilememory) as the parameters of the temperature compensation process.

FIG. 18 is a flowchart for describing the temperature compensationprocess executed by the integrated circuit device 20 (digital signalprocessing circuit 23) according to the embodiment. In a case where theprocess is started, the digital signal processing circuit 23 acquiresthe first to N-th temperature detection data TD1 to TDN from the firstto N-th temperature sensors 26 (S101) and performs a noise reductionfilter process (S102). Modifications can be made such that the filterprocess is not performed, or another noise reduction process isperformed.

Next, the digital signal processing circuit 23 performs a process ofobtaining the first frequency control data DDS1 by the neural networkcalculation, and a process of obtaining the second frequency controldata DDS2 by polynomial approximation. In the learning stage, since theresult of polynomial approximation is used in the calculation(calculation of difference) of the training data of the neural network,the coefficient of the polynomial approximation needs to be calculatedfirst. However, in a stage where calculation of the necessary parameters(the coefficient, the weight, and the bias) is completed, the order ofthe neural network calculation and the polynomial approximation is notlimited. Any of the neural network calculation or the polynomialapproximation may be performed first, or the neural network calculationand the polynomial approximation may be executed in parallel.

In the neural network calculation, a process of obtaining the input dataXin based on the first to N-th temperature detection data TD1 to TDN isperformed (S103). As described above, this process is calculation ofrepeated multiplication and calculation of the amount of change in time.The neural network calculation is performed with the calculated inputdata Xin as input in accordance with the weight and the bias acquired bythe learning process (S104). In the neural network, the number ofneurons in the output layer is one, and the first frequency control dataDDS1 is output.

In addition, the digital signal processing circuit performs polynomialapproximation that takes given temperature detection data TD based onthe temperature detection data TD1 to TDN acquired in 5101 as the input(variable) of the polynomial, and obtains the second frequency controldata DDS2 (S105).

A process of adding the first frequency control data DDS1 obtained in5104 and the second frequency control data DDS2 obtained in 5105 isperformed (S106), and the result of addition is output as the frequencycontrol data DDS to the oscillation signal generation circuit 40 (S107).

4. PROCESS OF ESTIMATING TEMPERATURE OF RESONATOR

As described above, in the temperature compensation process, adifference between the temperature detection data TD detected by thetemperature sensors 26 and the actual temperature of the resonator 10 isa cause of decrease in accuracy. Thus, in the embodiment describedabove, the temperature compensation process in which the effect of heatconduction is considered is performed by arranging the plurality oftemperature sensors 26 or obtaining the amount of change in time of thetemperature detection data TD.

However, in a case where the difference between the temperaturedetection data TD and the temperature of the resonator 10 is theproblem, it is considered that the temperature compensation process canbe implemented with high accuracy by estimating the temperature of theresonator 10 based on the temperature detection data TD. That is, thetemperature of the resonator 10 is estimated, and the polynomialapproximation and the neural network calculation are performed based onthe result of estimation (hereinafter, referred to as a temperatureestimation value).

4.1 Heat Conduction Model

First, a heat conduction model for obtaining the temperature estimationvalue from the temperature detection data will be described. FIG. 19 isa diagram for describing the heat conduction path of the resonatordevice 2 (oscillator). As described above using FIG. 9 and FIG. 10, theintegrated circuit device 20 is supported by the package 3 using theterminals TS1 and TS2 (BS1 and BS2). In addition, the integrated circuitdevice 20 supports the relay substrate 100 using the terminals T1 to T4(BU1 to BU4), and the relay substrate 100 supports the resonator 10 inBT1 and BT2.

In FIG. 19, a heat conduction path is illustrated by B1 to B10, and aheat emission (radiation) path is illustrated by B11 to B15. Asillustrated in FIG. 19, terminals that are used for connectionconstitute a main heat conduction path among the package 3, theintegrated circuit device 20, the relay substrate 100, and the resonator10. As described above using FIG. 12, the temperature sensors 26 (26-1to 26-4) are disposed in the vicinity of the terminals T1 to T4. Inaddition, another temperature sensor 26 not illustrated in FIG. 12 maybe added. FIG. 19 illustrates an example in which the temperaturesensors 26 (26-5 and 26-6) are disposed in the vicinity of the heatconduction path between the package 3 and the integrated circuit device20.

FIG. 20 is an example of a heat conduction model corresponding to FIG.19. It is known that heat conduction can be modeled as a heat circuitthat includes heat resistances and heat capacitances. In FIG. 20, C1 toC6 are nodes corresponding to the temperature sensors 26-1 to 26-6,respectively, and the temperature detection data TD of each temperaturesensor 26 corresponds to the electric potential of the node. Inaddition, C7 and C8 are nodes on the resonator 10, and the electricpotential of C7 or C8 corresponds to the temperature (temperatureestimation value) of the resonator 10.

The unit heat capacitance and the unit heat resistance are determineddepending on substances. Thus, the resistance value of each heatresistance (RT1 to RT28) and the capacitance value of each heatcapacitance (CT1 to CT8) in the circuit in FIG. 20 are determined basedon a specific structure (the material, the length, the sectional area,and the like of each member) of the oscillator. In the example in FIG.20, RT1 to RT8 are heat resistances of which the resistance values aredetermined by the characteristics of the integrated circuit device 20.In addition, RT9 to RT12 are heat resistances of which the resistancevalues are determined by the characteristics of the connection partbetween the integrated circuit device 20 and the relay substrate 100.The same applies to the other heat resistances. RT13 to RT18 correspondto the relay substrate 100. RT19 and RT20 correspond to the connectionpart between the relay substrate 100 and the resonator 10. RT21 is aheat resistance corresponding to the resonator 10. RT22 to RT25correspond to the connection part or heat radiation between theintegrated circuit device 20 and the package 3. RT26 and RT27 correspondto the part between the package 3 and the outside. RT28 is a heatresistance corresponding to the package 3. In addition, CT1 and CT2 areheat capacitances corresponding to the integrated circuit device 20. CT3and CT4 are heat capacitances corresponding to the relay substrate 100.CT5 and CT6 are heat capacitances corresponding to the resonator 10. CT7and CT8 are heat capacitances corresponding to the package 3.

As described above, the resistance value or the capacitance value ofeach element of the heat circuit can be determined in advance. Thus, bydetermining the electric potential of each node of Cl to C6 based on thetemperature detection data TD (TD1 to TD6) and performing a circuitsimulation process, the electric potential of C7 or C8, that is, thetemperature estimation value, can be obtained.

However, the circuit simulation process has a high process load. Thus,it is not easy to execute the circuit simulation process in the digitalsignal processing circuit 23 during the operation of the integratedcircuit device 20 (oscillator). Thus, the integrated circuit device 20(digital signal processing circuit 23) of the embodiment performs theneural network calculation that outputs the temperature estimation valuebased on the temperature detection data TD.

The data in FIG. 15 that is actually measured in the inspection step(the temperature sweep of the constant temperature chamber) may be usedas the temperature detection data TD used in the circuit simulationprocess. By the circuit simulation process using the change in time ofeach temperature detection data TD in FIG. 15 and the heat conductionmodel illustrated in FIG. 20, a change in time of the temperatureestimation value is obtained as illustrated in FIG. 21. The learningprocess of the neural network is performed using the input data Xinobtained based on FIG. 15 and the temperature estimation valueillustrated in FIG. 21 as training data. In the neural network afterlearning, calculation of outputting the temperature estimation value canbe performed by inputting the input data Xin.

4.2 First Configuration Example of Neural Network

FIG. 22 is a schematic diagram for describing the flow of temperaturecompensation process in the embodiment. The digital signal processingcircuit 23 obtains the temperature estimation value of the resonator 10by the neural network calculation process based on the first to N-thtemperature detection data TD1 to TDN and performs the temperaturecompensation calculation based on polynomial approximation using theobtained temperature estimation value.

By obtaining the temperature estimation value of the resonator 10 by theneural network calculation, a decrease in accuracy caused by adifference between the temperature detection data TD and the temperatureof the resonator 10 can be reduced.

Specifically, as illustrated in FIG. 22, the digital signal processingcircuit 23 obtains the temperature estimation value by performing afirst neural network calculation process based on the first to N-thtemperature detection data TD1 to TDN, obtains the first frequencycontrol data DDS1 by performing a second neural network calculationprocess based on the temperature estimation value, and obtains thesecond frequency control data DDS2 by performing the temperaturecompensation calculation based on polynomial approximation. The digitalsignal processing circuit 23 obtains the frequency control data DDSbased on the first frequency control data DDS1 and the second frequencycontrol data DDS2.

An inspection step (temperature sweep) for implementing the process inFIG. 22 is the same as that described above. That is, a change in timeof each temperature detection data TD (FIG. 15) and a change in time ofthe frequency of the oscillation signal (FIG. 16) are actually measured,and a change in time of the input data Xin and a change in time of thefrequency control data DDS are obtained based on the actual measurementdata. Furthermore, a change in time of the temperature estimation value(FIG. 21) is obtained by the circuit simulation process based on theactual measurement data (FIG. 15).

First, the weight and the bias are determined by performing the learningprocess of a first neural network with the temperature estimation valuecorresponding to the input data Xin as training data. In the firstneural network, the temperature of the resonator 10 needs to beaccurately estimated. Thus, the input data Xin includes the amount ofchange in time of the temperature detection data TD. More specifically,the input data Xin of the first neural network desirably includesinformation from the plurality of temperature sensors 26.

Next, the relationship between the temperature estimation value and thefrequency control data DDS is subjected to polynomial approximationusing the least squares method, and the coefficient of the polynomial isdetermined. After the coefficient of the polynomial is obtained, thefrequency control data (second frequency control data DDS2) based on thepolynomial approximation is obtained using the temperature detectiondata and the polynomial.

The difference between the frequency control data DDS and the secondfrequency control data DDS2 based on the polynomial approximation is thetraining data of the first frequency control data DDS1 to be output by asecond neural network. Thus, the weight and the bias are determined byperforming the learning process of the second neural network with thedifference correlated with the temperature estimation value as trainingdata. While the input data of the second neural network may be thetemperature estimation value, the repeatedly multiplied temperatureestimation value may be added to the input data in order to improveaccuracy by increasing the types of input.

The storage unit 24 of the integrated circuit device 20 stores thecoefficient of the polynomial, the weight and the bias of the firstneural network, and the weight and the bias of the second neural networkas the parameters of the temperature compensation process.

FIG. 23 is a flowchart for describing the temperature compensationprocess corresponding to FIG. 22. Processes of 5201 and 5202 are thesame as S101 and S102 in FIG. 18.

Next, the digital signal processing circuit 23 performs a process ofobtaining the input data Xin of the first neural network calculation(S203). In S203, it is desirable that data that includes the amount ofchange in time of the temperature detection data TD is calculated as theinput data Xin. The first neural network calculation is performed inaccordance with the input data Xin obtained in S203 and the weight andthe bias acquired by the learning process, and the temperatureestimation value is obtained (S204).

Next, the digital signal processing circuit 23 performs a process ofobtaining the first frequency control data DDS1 by the second neuralnetwork calculation, and a process of obtaining the second frequencycontrol data DDS2 by polynomial approximation. In the same manner as theexample in FIG. 18, the order of the second neural network calculationand the polynomial approximation is not limited. Any of the secondneural network calculation or the polynomial approximation may beperformed first, or the second neural network calculation and thepolynomial approximation may be executed in parallel.

In the second neural network calculation, a process of obtaining theinput data based on the temperature estimation value is performed(S205). As described above, this process is calculation of repeatedmultiplication of the temperature estimation value. The second neuralnetwork calculation is performed with the calculated input data as inputin accordance with the weight and the bias acquired by the learningprocess (S206). In the neural network, the number of neurons in theoutput layer is one, and the first frequency control data DDS1 isoutput.

In addition, the digital signal processing circuit performs polynomialapproximation that takes the temperature estimation value obtained inS204 as the input (variable) of the polynomial, and obtains the secondfrequency control data DDS2 (S207).

A process of adding the first frequency control data DDS1 obtained inS206 and the second frequency control data DDS2 obtained in S207 isperformed (S208), and the result of addition is output as the frequencycontrol data DDS to the oscillation signal generation circuit 40 (S209).

4.3 Second Configuration Example of Neural Network

FIG. 22 illustrates an example in which the neural network is dividedinto the first neural network for obtaining the temperature estimationvalue and the second neural network for obtaining the first frequencycontrol data. However, the configuration of the neural network is notlimited to such an example.

FIG. 24 is another schematic diagram for describing the flow oftemperature compensation process. As illustrated in FIG. 24, the digitalsignal processing circuit 23 obtains the temperature estimation valueand the first frequency control data DDS1 by a third neural networkcalculation process based on the first to N-th temperature detectiondata TD1 to TDN, and obtains the second frequency control data DDS2 bythe temperature compensation calculation based on polynomialapproximation. The digital signal processing circuit 23 obtains thefrequency control data DDS based on the first frequency control dataDDS1 and the second frequency control data DDS2.

An inspection step for implementing the process in FIG. 24 is the sameas the example in FIG. 22. That is, a change in time of each temperaturedetection data TD (FIG. 15) and a change in time of the frequency of theoscillation signal (FIG. 16) are actually measured, and a change in timeof the input data Xin and a change in time of the frequency control dataDDS are obtained based on the actual measurement data. Furthermore, achange in time of the temperature estimation value (FIG. 21) is obtainedby the circuit simulation process based on the actual measurement data(FIG. 15).

First, the relationship between the temperature estimation value and thefrequency control data DDS is subjected to polynomial approximationusing the least squares method, and the coefficient of the polynomial isdetermined. After the coefficient of the polynomial is obtained, thefrequency control data (second frequency control data DDS2) based on thepolynomial approximation is obtained using the temperature estimationvalue and the polynomial.

The difference between the frequency control data DDS and the secondfrequency control data DDS2 based on the polynomial approximation is thetraining data of the first frequency control data DDS1 to be output by athird neural network. The third neural network is a neural network thatperforms both of the calculation of the first frequency control dataDDS1 and the calculation of obtaining the temperature estimation value.Thus, the weight and the bias are determined by performing the learningprocess of the third neural network with both of the differencecorresponding to the input data Xin and the temperature estimation valuecorresponding to the input data Xin as training data. In the thirdneural network, the temperature of the resonator 10 needs to beaccurately estimated. Thus, the input data Xin includes the amount ofchange in time of the temperature detection data TD. More specifically,the input data Xin of the third neural network desirably includesinformation from the plurality of temperature sensors 26.

The storage unit 24 of the integrated circuit device 20 stores thecoefficient of the polynomial and the weight and the bias of the thirdneural network as the parameters of the temperature compensationprocess.

FIG. 25 is a flowchart for describing the temperature compensationprocess corresponding to FIG. 24. Processes of S301 and S302 are thesame as S101 and S102 in FIG. 18.

Next, the digital signal processing circuit 23 performs a process ofobtaining the input data Xin of the third neural network calculation(S303). The process of S303 is the same as 5203 in FIG. 23. Data thatincludes the amount of change in time of the temperature detection dataTD is calculated as the input data Xin.

The third neural network calculation is performed in accordance with theinput data Xin obtained in S303 and the weight and the bias acquired bythe learning process (S304). In the neural network, the number ofneurons in the output layer is two, and the first frequency control dataDDS1 and the temperature estimation value are output.

The digital signal processing circuit 23 performs polynomialapproximation that takes the temperature estimation value obtained inS304 as the input (variable) of the polynomial, and obtains the secondfrequency control ata DDS2 (S305).

A process of adding the first frequency control data DDS1 obtained inS304 and the second frequency control data DDS2 obtained in S305 isperformed (S306), and the result of addition is output as the frequencycontrol data DDS to the oscillation signal generation circuit 40 (S307).

5. MODIFICATION EXAMPLES

Hereinafter, several modification examples will be described.

5.1 Modification Example of Oscillation Signal Generation Circuit

FIG. 26 illustrates another configuration example of the integratedcircuit device 20. The oscillation signal generation circuit 40 of theintegrated circuit device 20 in FIG. 26 includes a variable capacitancecircuit 29 and the oscillation circuit 21. The D/A conversion circuit 25is not disposed in the oscillation signal generation circuit 40. Theoscillation frequency of the oscillation signal generated by theoscillation signal generation circuit 40 in FIG. 26 is directlycontrolled based on the frequency control data DDS from the digitalsignal processing circuit 23. That is, the oscillation frequency of theoscillation signal is controlled without the D/A conversion circuit 25.

The capacitance value of the variable capacitance circuit 29 iscontrolled based on the frequency control data DDS from the digitalsignal processing circuit 23. For example, the variable capacitancecircuit 29 includes a plurality of capacitors (capacitor array) and aplurality of switch elements (switch array) in which switching ON andOFF of each switch element is controlled based on the frequency controldata DDS. Each switch element of the plurality of switch elements iselectrically connected to each capacitor of the plurality of capacitors.By switching the plurality of switch elements ON or OFF, the number ofcapacitors of which one end is connected to one end of the resonator 10among the plurality of capacitors is changed. Accordingly, thecapacitance value of the variable capacitance circuit 29 is controlled,and the capacitance value at one end of the resonator 10 is changed.Accordingly, the capacitance value of the variable capacitance circuit29 is directly controlled using the frequency control data DDS, and theoscillation frequency of the oscillation signal can be controlled.

5.2 Modification Example of Controlling Oscillation Frequency Using PLLCircuit

FIG. 27 illustrates another configuration example of the integratedcircuit device 20. The oscillation signal generation circuit 40 of theintegrated circuit device 20 in FIG. 27 includes a PLL circuit 70. ThePLL circuit 70 is specifically a fractional-N type PLL circuit.

FIG. 28 is a configuration example of the PLL circuit 70. The PLLcircuit 70 includes a phase detector (phase comparator) 71, a chargepump circuit 72, a low pass filter 73, a voltage controlled oscillator74 (VCO), a divider 75, a fractional divider 76, and a delta-sigmamodulator 77.

The phase detector 71 compares the phase of a PLL oscillation signal fedback through the fractional divider 76 with the phase of a signal fromthe oscillation circuit 21 and outputs a voltage signal based on thedifference in phase. The charge pump circuit 72 converts the voltagesignal from the phase detector 71 into a current signal. The low passfilter 73 converts the current signal from the charge pump circuit 72into a voltage signal and performs a low pass filter process on thevoltage signal. The voltage controlled oscillator 74 oscillates at afrequency corresponding to the voltage value from the low pass filter73. The fractional divider 76 and the delta-sigma modulator divide thePLL oscillation signal from the voltage controlled oscillator 74 at adivision ratio of a fractional number (integer+fraction). The signalfrom the oscillation circuit 21 can be subjected to fractionalmultiplication by the fractional division.

For example, the division ratio of the fractional number is acquired asfollows. Data for setting the division ratio is input into thedelta-sigma modulator 77 as the frequency control data DSS from thedigital signal processing circuit 23. The delta-sigma modulator 77generates a switching signal by delta-sigma modulation such that theaverage value of the switching signal is a desired fractional numberrepresented by the frequency control data DDS, and switches a pluralityof integer division ratios using the switching signal. For example, in acase where P division and P+1 division are switched at 1:1, an averagefractional division ratio of P+0.5 is acquired.

The divider 75 divides the PLL oscillation signal from the voltagecontrolled oscillator 74 and outputs the divided signal to the outputcircuit 22.

As described above, in the example in FIG. 27, the frequency controldata DSS output by the digital signal processing circuit 23 is data thatdetermines the division ratio of the PLL circuit 70. In other words, thedigital signal processing circuit 23 can control the oscillationfrequency of the oscillation signal using the PLL circuit by outputtingan appropriate division ratio as the frequency control data DDS.

5.3 Modification Example of Inspection Step

A method of measuring the oscillation frequency in the inspection step(FIG. 16), measuring the temperature characteristics of the varactor(FIG. 2), and obtaining a change in time of the frequency control dataDDS based on the oscillation frequency and the temperaturecharacteristics is described above. A method of obtaining the frequencycontrol data DDS is not limited to such a method. A fractional PLLcircuit may be used in the inspection step. This fractional PLL circuitmay be an inspection PLL circuit disposed in an inspection device or maybe the PLL circuit 70 included in the integrated circuit device 20having the configuration in FIG. 27.

Specifically, in the inspection step, a reference clock is input fromthe outside, and the oscillation frequency of the resonator 10 is lockedat a frequency based on the reference clock by the fractional PLLcircuit. In such a state, the frequency control data DDS output from thedigital signal processing circuit 23 has a value that causes anoscillation signal of a desired frequency to be output. That is, byusing the fractional PLL circuit, the frequency control data DDS can beactually measured directly without measuring the temperaturecharacteristics of the varactor (FIG. 2).

In addition, as described above, in order to improve the accuracy of theneural network, it is desirable to use various training data, andmeasurement may be performed by a plurality of temperature sweeps.However, as is understood from the example in FIG. 4, one temperaturesweep requires a certain amount of time. Thus, the amount of timerequired for measuring data is increased.

Thus, learning data may be generated by virtually performing thetemperature sweep without actually measuring data by actually performingthe temperature sweep. First, in the initial temperature sweep, theconstant temperature chamber is actually controlled, and the temperaturedetection data TD and the oscillation frequency are actually measured(FIG. 15 and FIG. 16). The temperature estimation value is calculatedbased on the actually measured temperature detection data TD and theheat conduction model, and the relationship between the temperatureestimation value and the frequency is obtained based on the calculationresult (FIG. 21) and the actual measurement data (FIG. 16). Therelationship between the temperature estimation value and the frequencyis the temperature characteristics of the resonator 10.

In addition, in the heat conduction model, temperature fluctuation ofthe resonator 10 in a case where the outside temperature (thetemperature of the constant temperature chamber) fluctuates can beestimated. For example, a voltage source in the heat circuit in FIG. 20may be considered as the temperature of the constant temperaturechamber, or a node (and necessary heat resistances and heatcapacitances) corresponding to the constant temperature chamber may beadded to FIG. 20. By using the heat conduction model, a change in timeof the temperature of the resonator 10 (the electric potential of C7 orC8) with respect to any virtual temperature sweep can be obtained. Achange in time of the oscillation frequency can be estimated based on achange in time of the temperature of the resonator 10 and thetemperature characteristics of the resonator 10 obtained in the initialtemperature sweep.

That is, once the temperature characteristics of the resonator 10 areestimated, data (data corresponding to FIG. 15 or FIG. 16) in a casewhere any temperature sweep is performed can be estimated afterwardwithout actually executing the temperature sweep. Then, various learningdata can be acquired in a small amount of time, and a high accuracyneural network calculation can be easily implemented.

6. ELECTRONIC DEVICE AND VEHICLE

FIG. 29 illustrates a configuration example of an electronic device 500that includes the resonator device 2 (integrated circuit device 20) ofthe embodiment. The electronic device 500 includes the resonator device2 including the integrated circuit device 20 and the resonator 10, and aprocessing unit 520. In addition, a communication unit 510, an operationunit 530, a display unit 540, a storage unit 550, and an antenna ANT canbe included.

It can be assumed that the electronic device 500 is, for example, anetwork-related device such as a base station or a router, a highaccuracy measurement device that measures a physical quantity such as adistance, a time, a flow speed, or a flow rate, a biometric informationmeasurement device (an ultrasonic measurement device, a pulse wavemeter, a blood pressure measurement device, or the like) that measuresbiometric information, or a vehicle-mounted device (a device or the likefor automatic driving). In addition, it can be assumed that theelectronic device 500 is a wearable device such as a head mounted typedisplay device or a timepiece-related device, a robot, a printingdevice, a projection device, a portable information terminal (smartphoneor the like) a contents providing device that distributes contents, or avideo device such as a digital camera or a video camera.

The communication unit 510 (communication interface) performs a processof receiving data from the outside or transmitting data to the outsidethrough the antenna ANT. The processing unit 520 (processor) performs acontrol process for the electronic device 500 and various digitalprocesses and the like for the data transmitted and received through thecommunication unit 510. The function of the processing unit 520 can beimplemented by a processor such as a microcomputer. The operation unit530 (operation interface) is used for a user to perform an inputoperation and can be implemented by an operation button, a touch paneldisplay, or the like. The display unit 540 displays various informationand can be implemented by, for example, a liquid crystal or an organicEL display. The storage unit 550 stores data. The function of thestorage unit 550 can be implemented by a semiconductor memory such asRAM or ROM, a hard disk drive (HDD), or the like.

FIG. 30 illustrates an example of a vehicle that includes the resonatordevice 2 (integrated circuit device 20) of the embodiment. The resonatordevice 2 (an oscillator or a physical quantity measurement device) ofthe embodiment can be embedded in various vehicles such as a car, anairplane, a motorcycle, a bicycle, a robot, and a ship. The vehicle is adevice or an apparatus that includes a drive mechanism such as an engineor a motor, a steering mechanism such as a steering wheel or a rudder,and various electronic devices (vehicle-mounted devices) and moves onthe ground, in the air, or on the sea. FIG. 30 schematically illustratesan automobile 206 as a specific example of the vehicle. The resonatordevice 2 of the embodiment is embedded in the automobile 206. A controldevice 208 performs various control processes based on the clock signalgenerated by the resonator device 2 or physical quantity informationmeasured by the resonator device 2. For example, in a case wheredistance information related to an object around the automobile 206 ismeasured as the physical quantity information, the control device 208performs various control processes for automatic driving using themeasured distance information. For example, the control device 208controls the firmness of suspension or controls brakes of individualwheels 209 depending on the attitude of a vehicle body 207. A device inwhich the resonator device 2 of the embodiment is embedded is notlimited to the control device 208. The resonator device 2 can beembedded in various devices disposed in the vehicle such as theautomobile 206 or a robot.

While the embodiment is described in detail above, it can be easilyperceived by those skilled in the art that many modifications can bemade without substantially departing from the novel matters and effectsof the invention. Accordingly, all of such modification examples fallwithin the scope of the invention. For example, a term that is used atleast once along with a different term having a wider sense or the samesense in the specification or the drawings can be replaced with thedifferent term at any location in the specification or the drawings. Inaddition, all combinations of the embodiment and the modificationexamples fall within the scope of the invention. In addition, theconfiguration and operation of the resonator device, the circuit device,the electronic device, and the vehicle and the arrangementconfiguration, the connection configuration, and the like of theresonator, the relay substrate, and the circuit device in the resonatordevice are not limited to those described in the embodiment, and variousmodifications can be made.

The entire disclosure of Japanese Patent Application No. 2018-011418,filed Jan. 26, 2018 is expressly incorporated by reference herein.

What is claimed is:
 1. An integrated circuit device comprising: adigital signal processing circuit that generates frequency control databy performing a temperature compensation process using a neural networkcalculation process based on temperature detection data and an amount ofchange in time of the temperature detection data; and an oscillationsignal generation circuit that generates an oscillation signal of afrequency set by the frequency control data using a resonator.
 2. Theintegrated circuit device according to claim 1, further comprising: adrive circuit that drives the resonator; a first oscillation terminalcoupled to one of an input node or an output node of the drive circuit;a second oscillation terminal coupled to the other of the input node orthe output node of the drive circuit; a power supply terminal where apower supply voltage is supplied; an output terminal from which theoscillation signal is output; and a first temperature sensor thatgenerates the temperature detection data, wherein a distance between thefirst temperature sensor and the first oscillation terminal is smallerthan at least one of a distance between the first temperature sensor andthe power supply terminal or a distance between the first temperaturesensor and the output terminal.
 3. The integrated circuit deviceaccording to claim 2, further comprising: a second temperature sensor,wherein a distance between the second temperature sensor and the secondoscillation terminal is smaller than at least one of a distance betweenthe second temperature sensor and the power supply terminal or adistance between the second temperature sensor and the output terminal.4. The integrated circuit device according to claim 2, furthercomprising: a third temperature sensor; and a support terminal in whichan electrode for supporting the resonator is disposed, wherein adistance between the third temperature sensor and the support terminalis smaller than at least one of a distance between the third temperaturesensor and the power supply terminal or a distance between the thirdtemperature sensor and the output terminal.
 5. The integrated circuitdevice according to claim 2, further comprising: a third temperaturesensor; and a support terminal in which an electrode for supporting arelay substrate on which the resonator is mounted is disposed, wherein adistance between the third temperature sensor and the support terminalis smaller than at least one of a distance between the third temperaturesensor and the power supply terminal or a distance between the thirdtemperature sensor and the output terminal.
 6. The integrated circuitdevice according to claim 1, wherein the digital signal processingcircuit performs the temperature compensation process based on a resultof temperature compensation calculation using polynomial approximationand a result of the neural network calculation process.
 7. Theintegrated circuit device according to claim 6, wherein the digitalsignal processing circuit obtains a temperature estimation value of theresonator by the neural network calculation process and performs thetemperature compensation calculation based on the polynomialapproximation using the obtained temperature estimation value.
 8. Theintegrated circuit device according to claim 7, wherein the digitalsignal processing circuit obtains the temperature estimation value by afirst neural network calculation process based on the temperaturedetection data and the amount of change in time, obtains first frequencycontrol data by a second neural network calculation process based on thetemperature estimation value, obtains second frequency control data bythe temperature compensation calculation based on the polynomialapproximation, and obtains the frequency control data based on the firstfrequency control data and the second frequency control data.
 9. Theintegrated circuit device according to claim 7, wherein the digitalsignal processing circuit obtains the temperature estimation value andfirst frequency control data by third neural network calculation basedon the temperature detection data and the amount of change in time,obtains second frequency control data by the temperature compensationcalculation based on the polynomial approximation, and obtains thefrequency control data based on the first frequency control data and thesecond frequency control data.
 10. An integrated circuit devicecomprising: first to N-th (N is an integer greater than or equal to two)temperature sensors; an A/D conversion circuit that performs A/Dconversion on first to N-th temperature detection voltages from thefirst to N-th temperature sensors and outputs first to N-th temperaturedetection data; a digital signal processing circuit that generatesfrequency control data by performing a temperature compensation processby a neural network calculation process based on an amount of change intime of i-th (i is an integer satisfying 1≤i≤N) temperature detectiondata of the first to N-th temperature detection data; and an oscillationsignal generation circuit that generates an oscillation signal of anoscillation frequency corresponding to the frequency control data usinga resonator.
 11. An oscillator comprising: a resonator; and anintegrated circuit device including: a digital signal processing circuitthat generates frequency control data by performing a temperaturecompensation process using a neural network calculation process based ontemperature detection data and an amount of change in time of thetemperature detection data; and an oscillation signal generation circuitthat generates an oscillation signal of a frequency set by the frequencycontrol data using the resonator.
 12. An electronic device comprising:the integrated circuit device according to claim
 1. 13. A vehiclecomprising: the integrated circuit device according to claim 1.